JPS5166852A - Musetsushokukogakupuroobu - Google Patents

Musetsushokukogakupuroobu

Info

Publication number
JPS5166852A
JPS5166852A JP14019274A JP14019274A JPS5166852A JP S5166852 A JPS5166852 A JP S5166852A JP 14019274 A JP14019274 A JP 14019274A JP 14019274 A JP14019274 A JP 14019274A JP S5166852 A JPS5166852 A JP S5166852A
Authority
JP
Japan
Prior art keywords
musetsushokukogakupuroobu
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14019274A
Other languages
English (en)
Inventor
Juji Etsuzaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Komatsu Ltd
Original Assignee
Komatsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Komatsu Ltd filed Critical Komatsu Ltd
Priority to JP14019274A priority Critical patent/JPS5166852A/ja
Publication of JPS5166852A publication Critical patent/JPS5166852A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
JP14019274A 1974-12-06 1974-12-06 Musetsushokukogakupuroobu Pending JPS5166852A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14019274A JPS5166852A (ja) 1974-12-06 1974-12-06 Musetsushokukogakupuroobu

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14019274A JPS5166852A (ja) 1974-12-06 1974-12-06 Musetsushokukogakupuroobu

Publications (1)

Publication Number Publication Date
JPS5166852A true JPS5166852A (ja) 1976-06-09

Family

ID=15263038

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14019274A Pending JPS5166852A (ja) 1974-12-06 1974-12-06 Musetsushokukogakupuroobu

Country Status (1)

Country Link
JP (1) JPS5166852A (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0225710A (ja) * 1988-07-15 1990-01-29 Hitachi Ltd パターン検査方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0225710A (ja) * 1988-07-15 1990-01-29 Hitachi Ltd パターン検査方法

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