JPS5187979A - Bunryosankabutsuryoikiojusuru handotaisochinoseizohoho - Google Patents

Bunryosankabutsuryoikiojusuru handotaisochinoseizohoho

Info

Publication number
JPS5187979A
JPS5187979A JP1258475A JP1258475A JPS5187979A JP S5187979 A JPS5187979 A JP S5187979A JP 1258475 A JP1258475 A JP 1258475A JP 1258475 A JP1258475 A JP 1258475A JP S5187979 A JPS5187979 A JP S5187979A
Authority
JP
Japan
Prior art keywords
handotaisochinoseizohoho
bunryosankabutsuryoikiojusuru
bunryosankabutsuryoikiojusuru handotaisochinoseizohoho
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1258475A
Other languages
English (en)
Other versions
JPS5548697B2 (ja
Inventor
Akio Hayasaka
Hideo Noda
Michio Suzuki
Hiroyuki Kondo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP1258475A priority Critical patent/JPS5187979A/ja
Publication of JPS5187979A publication Critical patent/JPS5187979A/ja
Publication of JPS5548697B2 publication Critical patent/JPS5548697B2/ja
Granted legal-status Critical Current

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  • Element Separation (AREA)
JP1258475A 1975-01-31 1975-01-31 Bunryosankabutsuryoikiojusuru handotaisochinoseizohoho Granted JPS5187979A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1258475A JPS5187979A (ja) 1975-01-31 1975-01-31 Bunryosankabutsuryoikiojusuru handotaisochinoseizohoho

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1258475A JPS5187979A (ja) 1975-01-31 1975-01-31 Bunryosankabutsuryoikiojusuru handotaisochinoseizohoho

Related Child Applications (2)

Application Number Title Priority Date Filing Date
JP13518079A Division JPS5570043A (en) 1979-10-22 1979-10-22 Fabricating method of semiconductor device having isolating oxide region
JP13517979A Division JPS5570042A (en) 1979-10-22 1979-10-22 Fabricating method of semiconductor device having isolating oxide region

Publications (2)

Publication Number Publication Date
JPS5187979A true JPS5187979A (ja) 1976-07-31
JPS5548697B2 JPS5548697B2 (ja) 1980-12-08

Family

ID=11809391

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1258475A Granted JPS5187979A (ja) 1975-01-31 1975-01-31 Bunryosankabutsuryoikiojusuru handotaisochinoseizohoho

Country Status (1)

Country Link
JP (1) JPS5187979A (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5496979A (en) * 1978-01-18 1979-07-31 Hitachi Ltd Manufacture of semiconductor integrated circuit device
JPS57207350A (en) * 1981-06-16 1982-12-20 Nec Corp Manufacture of semiconductor device

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4917977A (ja) * 1972-04-08 1974-02-16

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4917977A (ja) * 1972-04-08 1974-02-16

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5496979A (en) * 1978-01-18 1979-07-31 Hitachi Ltd Manufacture of semiconductor integrated circuit device
JPS57207350A (en) * 1981-06-16 1982-12-20 Nec Corp Manufacture of semiconductor device

Also Published As

Publication number Publication date
JPS5548697B2 (ja) 1980-12-08

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