JPS5199971A - - Google Patents
Info
- Publication number
- JPS5199971A JPS5199971A JP50024841A JP2484175A JPS5199971A JP S5199971 A JPS5199971 A JP S5199971A JP 50024841 A JP50024841 A JP 50024841A JP 2484175 A JP2484175 A JP 2484175A JP S5199971 A JPS5199971 A JP S5199971A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Chemical Vapour Deposition (AREA)
- Element Separation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP50024841A JPS5199971A (de) | 1975-02-28 | 1975-02-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP50024841A JPS5199971A (de) | 1975-02-28 | 1975-02-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5199971A true JPS5199971A (de) | 1976-09-03 |
Family
ID=12149424
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP50024841A Pending JPS5199971A (de) | 1975-02-28 | 1975-02-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5199971A (de) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4323417A (en) * | 1980-05-06 | 1982-04-06 | Texas Instruments Incorporated | Method of producing monocrystal on insulator |
| US4555300A (en) * | 1984-02-21 | 1985-11-26 | North American Philips Corporation | Method for producing single crystal layers on insulators |
| WO2023013483A1 (ja) * | 2021-08-05 | 2023-02-09 | 東京エレクトロン株式会社 | 成膜方法及び成膜装置 |
-
1975
- 1975-02-28 JP JP50024841A patent/JPS5199971A/ja active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4323417A (en) * | 1980-05-06 | 1982-04-06 | Texas Instruments Incorporated | Method of producing monocrystal on insulator |
| US4555300A (en) * | 1984-02-21 | 1985-11-26 | North American Philips Corporation | Method for producing single crystal layers on insulators |
| WO2023013483A1 (ja) * | 2021-08-05 | 2023-02-09 | 東京エレクトロン株式会社 | 成膜方法及び成膜装置 |
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