JPS52102999A - Ion source device - Google Patents

Ion source device

Info

Publication number
JPS52102999A
JPS52102999A JP1873076A JP1873076A JPS52102999A JP S52102999 A JPS52102999 A JP S52102999A JP 1873076 A JP1873076 A JP 1873076A JP 1873076 A JP1873076 A JP 1873076A JP S52102999 A JPS52102999 A JP S52102999A
Authority
JP
Japan
Prior art keywords
source device
ion source
magnetic lines
changing
pattern
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1873076A
Other languages
Japanese (ja)
Other versions
JPS5851377B2 (en
Inventor
Shinzaburo Matsuda
Norimichi Oga
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Japan Atomic Energy Agency
Original Assignee
Japan Atomic Energy Research Institute
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Japan Atomic Energy Research Institute filed Critical Japan Atomic Energy Research Institute
Priority to JP51018730A priority Critical patent/JPS5851377B2/en
Publication of JPS52102999A publication Critical patent/JPS52102999A/en
Publication of JPS5851377B2 publication Critical patent/JPS5851377B2/en
Expired legal-status Critical Current

Links

Landscapes

  • Particle Accelerators (AREA)
  • Electron Sources, Ion Sources (AREA)

Abstract

PURPOSE: An ion source device with uniform density of a source plasma by means of changing the pattern of magnetic lines and of supplying electrons along with magnetic lines thereof.
COPYRIGHT: (C)1977,JPO&Japio
JP51018730A 1976-02-23 1976-02-23 ion source device Expired JPS5851377B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP51018730A JPS5851377B2 (en) 1976-02-23 1976-02-23 ion source device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP51018730A JPS5851377B2 (en) 1976-02-23 1976-02-23 ion source device

Publications (2)

Publication Number Publication Date
JPS52102999A true JPS52102999A (en) 1977-08-29
JPS5851377B2 JPS5851377B2 (en) 1983-11-16

Family

ID=11979773

Family Applications (1)

Application Number Title Priority Date Filing Date
JP51018730A Expired JPS5851377B2 (en) 1976-02-23 1976-02-23 ion source device

Country Status (1)

Country Link
JP (1) JPS5851377B2 (en)

Also Published As

Publication number Publication date
JPS5851377B2 (en) 1983-11-16

Similar Documents

Publication Publication Date Title
JPS51116224A (en) A process and an apparatus for producing carbon fibers
JPS51111076A (en) Exposure device
JPS51131389A (en) Device for uniform polarized magnetic field
JPS51135461A (en) Exposing-method
JPS52119185A (en) Electron beam exposure equipment
JPS5333689A (en) Composite ion source for mass spectrometer
JPS5244174A (en) Plasma treatment device
JPS526840A (en) Current interception ignition device
JPS52102999A (en) Ion source device
JPS5230938A (en) Microwave heating appartus
JPS5341982A (en) Wafer holder for ion implantation processing
JPS5338263A (en) Plasma treating apparatus of semiconductors
JPS521851A (en) Travelling apparatus
JPS5362477A (en) Electron beam drawing device
JPS51144053A (en) Duct penetrating through radioactive atmosphere
JPS5219070A (en) Distribution method
JPS5211447A (en) High frequency heating apparatus
JPS51132484A (en) Semiconductive composed material for power cable
JPS52115161A (en) Electron gun for electron beam exposing device
JPS5325366A (en) Plasma treating method and apparat us
JPS51124735A (en) A control apparatus for the fuel amount control apparatus
JPS52116078A (en) Electron beam-exposing device
JPS5440572A (en) Electron-beam pattern projector
JPS5297785A (en) Ion source device
JPS5234758A (en) Process for the fabrication of a character plate