JPS5212588A - Production method of semi-conductor device - Google Patents

Production method of semi-conductor device

Info

Publication number
JPS5212588A
JPS5212588A JP8830375A JP8830375A JPS5212588A JP S5212588 A JPS5212588 A JP S5212588A JP 8830375 A JP8830375 A JP 8830375A JP 8830375 A JP8830375 A JP 8830375A JP S5212588 A JPS5212588 A JP S5212588A
Authority
JP
Japan
Prior art keywords
semi
conductor device
production method
production
prevent
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8830375A
Other languages
Japanese (ja)
Inventor
Tokio Kato
Hiroshi Kato
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP8830375A priority Critical patent/JPS5212588A/en
Publication of JPS5212588A publication Critical patent/JPS5212588A/en
Pending legal-status Critical Current

Links

Landscapes

  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Weting (AREA)

Abstract

PURPOSE: In a semi-conductor device with a multilayer wiring, to prevent the production of hillocks by forming a non-porous alminum oxide film on the surface of Al wiring, and besides to prevent the production of a crack of a film (SOG (Spin on Glass) + PSG (phospho-silicate glass) to be formed on the above aluminium oxide film.
COPYRIGHT: (C)1977,JPO&Japio
JP8830375A 1975-07-21 1975-07-21 Production method of semi-conductor device Pending JPS5212588A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8830375A JPS5212588A (en) 1975-07-21 1975-07-21 Production method of semi-conductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8830375A JPS5212588A (en) 1975-07-21 1975-07-21 Production method of semi-conductor device

Publications (1)

Publication Number Publication Date
JPS5212588A true JPS5212588A (en) 1977-01-31

Family

ID=13939150

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8830375A Pending JPS5212588A (en) 1975-07-21 1975-07-21 Production method of semi-conductor device

Country Status (1)

Country Link
JP (1) JPS5212588A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5643743A (en) * 1979-09-17 1981-04-22 Fujitsu Ltd Manufacture of semiconductor device
JPS57181124A (en) * 1981-05-01 1982-11-08 Oki Electric Ind Co Ltd Manufacture of semiconductor device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5643743A (en) * 1979-09-17 1981-04-22 Fujitsu Ltd Manufacture of semiconductor device
JPS57181124A (en) * 1981-05-01 1982-11-08 Oki Electric Ind Co Ltd Manufacture of semiconductor device

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