JPS52141568A - Oxidizing semiconductor - Google Patents

Oxidizing semiconductor

Info

Publication number
JPS52141568A
JPS52141568A JP5437477A JP5437477A JPS52141568A JP S52141568 A JPS52141568 A JP S52141568A JP 5437477 A JP5437477 A JP 5437477A JP 5437477 A JP5437477 A JP 5437477A JP S52141568 A JPS52141568 A JP S52141568A
Authority
JP
Japan
Prior art keywords
quartz tube
oxidizing semiconductor
face
oxidizing
semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5437477A
Other languages
Japanese (ja)
Other versions
JPS5435070B2 (en
Inventor
Shigeru Kawamata
Kenji Miyata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP5437477A priority Critical patent/JPS52141568A/en
Publication of JPS52141568A publication Critical patent/JPS52141568A/en
Publication of JPS5435070B2 publication Critical patent/JPS5435070B2/ja
Granted legal-status Critical Current

Links

Abstract

PURPOSE: The anode and the cathode are arranged face-to-face in the inside of the quartz tube and the high frequency voltage is applied to both electrode and the spark discharge in the quartz tube is actuated to ensure the ignition of H2 gas, so that the oxidized Si coat can be formed uniformly.
COPYRIGHT: (C)1977,JPO&Japio
JP5437477A 1977-05-13 1977-05-13 Oxidizing semiconductor Granted JPS52141568A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5437477A JPS52141568A (en) 1977-05-13 1977-05-13 Oxidizing semiconductor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5437477A JPS52141568A (en) 1977-05-13 1977-05-13 Oxidizing semiconductor

Publications (2)

Publication Number Publication Date
JPS52141568A true JPS52141568A (en) 1977-11-25
JPS5435070B2 JPS5435070B2 (en) 1979-10-31

Family

ID=12968886

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5437477A Granted JPS52141568A (en) 1977-05-13 1977-05-13 Oxidizing semiconductor

Country Status (1)

Country Link
JP (1) JPS52141568A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58210613A (en) * 1982-06-02 1983-12-07 Hitachi Ltd Quartz tube for heat treatment furnace

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58210613A (en) * 1982-06-02 1983-12-07 Hitachi Ltd Quartz tube for heat treatment furnace

Also Published As

Publication number Publication date
JPS5435070B2 (en) 1979-10-31

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