JPS58210613A - Quartz tube for heat treatment furnace - Google Patents

Abstract

PURPOSE:To permit positive sealing and to achieve energy saving with a gas inlet part of simplified structure by a construction wherein gas inlets for guiding various gases are provided on the end and peripheral walls of a connector tube connected to the end of a quartz tube. CONSTITUTION:A branch tube part 11 is integrally formed on the inlet end side of a heat treatment part 10 of a quartz tube, and a connector tube 13 is connected to the branch tube part 11. A H2 gas conduit 16 is coaxially inserted through the center of an end wall 15 of the connector tube 13 to introduce H2 gas into the heat treatment part 10 through the H2 gas conduit 16. On the other hand, O2 gas is introduced into the connector tube 13 radially from an O2 gas conduit connector 18 provided on a peripheral wall 17 of the connector tube 13 and then guided into the heat treatment part 10 through a doghnut-like O2 gas flow passage 19 within the branch tube part 11. Thereby, both H2 gas and O2 gas are mixed with each other in the heat treatment part 10 to offer combustion gas. Thus, since only the single H2 gas conduit 16 is inserted through the end wall 15 of the connector tube 13 which constitutes the end wall of the quartz tube, it becomes possible to simplify the end wall 15 in its structure, machining as well as sealing which is advantageous in energy saving.

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a quartz tube for use in a heat treatment furnace for semiconductor products.

Conventionally, in the process of manufacturing semiconductor products, when semiconductor substrates (wafers) are subjected to diffusion treatment, H2, O! As shown in the figure, multiple gases are introduced and mixed in the furnace, and gXt is generated on the surface of the wafer.

However, in the conventional heat treatment furnace, as shown in FIG. 1, the gas conduit 2.3 and the thermocouple insertion tube 4 provided at the end of the heat treatment furnace 1 are separated from each other. Therefore, when sealing the hearth to save energy, sealing is difficult and processing is troublesome. 1. Even when using a quartz tube as a heat treatment furnace, it is desirable to rotate the tube in order to prevent deformation due to high temperatures, but with the conventional structure described above, it is not possible to rotate the tube, and this prevents deformation of the tube. I become unable to do so.

An object of the present invention is to solve the problems of the prior art described above, to provide a quartz for heat treatment furnace which has a simple structure for the gas introduction part, can perform reliable sealing, and can utilize F-singing energy.
It's about providing grapes.

To achieve this objective, the present invention provides multiple types of gas r4
A gas inlet t for the purpose of connecting the quartz tube is provided on the end wall and peripheral wall of the connector tube connected to the end of the quartz tube.

Hereinafter, the present invention will be explained in detail according to embodiments shown in the drawings.

FIG. 2 is a perspective view showing one embodiment of a quartz tube for a heat treatment furnace according to the present invention, FIG. 3 is an enlarged sectional view of the main part thereof, and FIG. 4 is a cross-sectional view of a branch pipe portion.

In this embodiment, the quartz tube for a heat treatment furnace includes a heat treatment section 10 which is a tube body, and a branch pipe m11 formed at the gas introduction end side of the tube body.
It consists of. The heat treatment section 1O is a diffusion treatment section 1! It has an inner diameter commensurate with the diameter of the semiconductor sea urchin (not shown) to be applied. The branch pipe section 11 constitutes an introduction section for combustion gas into the heat treatment section IO.

This branch pipe portion 11 has a thin tube shape, and its artificial end side has a tapered portion 1.
2, and this tapered part 12 has a connector pipe 13.
The taper s14 is inserted and continuous by collating.

The connector pipe 13 is a connector pipe for introducing gas into the distribution section 11, and an end wall 15 for sealing and preventing heat radiation is formed at the opposite end of the tapered part 14.

An H gas conduit 16 (longitudinal gas conduit) for supplying hydrogen (H2) gas for combustion is inserted through the center of the end wall 15, and the tip of this H gas conduit 16 is a quartz tube. It extends in the middle 1 of the heat treatment section 10, and the rear end is (9) H!
connected to a gas source.

On the other hand, a part of the peripheral wall 17 of the connector pipe 13 is used for supplying m8 (Ox) gas for combustion. Gas pipe (
An 02 gas conduit connector 18 is attached to connect the radial gas conduit.

The connector 18 for this Ol gas 4 is provided in the radial direction of the connector pipe 13 so as to be perpendicular to the H gas pipe 16, and is connected to the branch pipe portion 11 from the 03 gas t connector pipe 13 from the 03 gas pipe. It is supplied into the heat treatment E1 section 10 of the quartz tube through the doughnut-shaped 03 gas flow path 19 between the inner peripheral surface and the outer peripheral surface of the H2 gas conduit 16, and is heat treated with the H11 gas from the H1 gas conduit 16. Mix and combust in section IO.

In this embodiment, a branch pipe part 11 is integrally formed on the inlet end side of the heat treatment section 10 of the quartz tube, a connector pipe 13 is connected to this branch pipe part 11, and the central part of the end wall 15 of the connector pipe 13 is connected to the branch pipe part 11. The H2 gas conduit 11 is inserted rotationally into the H2 gas conduit 11 and introduced into the H2 gas r heat treatment section 10 through the H2 gas conduit 16i. O! introduced radially into the connector tube 13 from 18! Connect the gas to the donut-shaped O of the branch pipe section 1
Since the R gas is introduced into the heat treatment section 10 through the R gas flow path 19, the H3 gas and the 02 gas are mixed within the heat treatment section 10.
Used as combustion gas.

Therefore, in the case of this embodiment, the bottom wall of the quartz tube kll
Since only one H2 gas conduit 16 is inserted through the end wall 15 of the connector tube 13, the end wall 15 can be easily constructed, processed and sealed, which is advantageous for energy saving. Of course, the gas introduction structure itself is simpler, and since the quartz tube is separated from the gas introduction part,
The structure of the quartz tube itself is also simple. Moreover, in this embodiment, since the quartz tube can be rotated, deformation of the quartz tube due to heat can be prevented. Furthermore, according to this embodiment, the advantage and disadvantage that the structure of the heat radiation prevention plate attached to the rear part of the end wall of the gas introduction part is simplified can be obtained.

FIG. 5 is a perspective view showing another embodiment of the quartz tube for a heat treatment furnace according to the present invention, FIG. 6 is an enlarged sectional view of the main part thereof, and FIG. 7 is a cross-sectional view of a branch pipe portion.

In this real hook, a tube 20 for inserting a thermocouple is provided in parallel with and in close contact with the B2 gas conduit f16, and both tubes 16 and 20 are integrally fixed to each other by welding or the like.

This thermocouple insertion tube 20 is for inserting a thermocouple for detecting the depth of the ignition position of H, gas, and OL gas, and the end y#A is shorter than the H2 gas conduit 16. By providing the Shikono pipe 20, the H1 gas conduit 16
is no longer coaxial with the quartz tube, for example, the branch tube s1
1 has a cross-sectional structure as shown in FIG. Therefore, the 02 gas supplied from the 02 gas conduit connector 18 into the connector pipe 13 passes through the 02 gas flow path 19ai between the inner periphery of the branch pipe section 11 and the outer periphery of the pipes 16 and 20, and enters the heat treatment section 10. Supplied to H! It is mixed with H8 gas from gas conduit 16 and combusted.

As described above, according to the present invention, the structure of the gas introduction part into the quartz tube is simplified, its processing and sealing are easy, and energy can be saved.

[Brief explanation of the drawing]

Fig. 1 is a partial front view of a conventional quartz tube, Fig. 2 is a perspective view of an embodiment of a quartz tube for heat treatment furnaces according to the present invention, Fig. 3 is an enlarged sectional view of its main parts, and Fig. 4 is a branch. FIG. 5 is a perspective view of another embodiment of the present invention, FIG. 6 is an enlarged sectional view of the main part thereof, and FIG. 7 is a cross-sectional view of the branch portion. DESCRIPTION OF SYMBOLS 10... Heat treatment part, 11... Branch pipe part, 12... Taper part, 13... Connector pipe, 14... Taper part,
15... End wall, 16... H2 gas conduit, 17...
Peripheral wall, 18...02 Gas pipe connector, 19.1
9a...02 gas flow path, 20...tube for thermocouple. Agent Patent Attorney Bo 1) Li Xin ゛). (7) 1. □19 59-

Claims (1)

[Claims] 1. In a quartz tube for a heat treatment furnace in which multiple types of gases are introduced into the quartz tube to form a film on a semiconductor substrate in a heat treatment section, a connector tube is fully connected to the end of the quartz tube, and this The gas introduction location is formed on the end wall and surrounding wall of the connector pipe, and the end of the quartz tube is formed by a branch pipe and a connector pipe connected to this branch pipe, and a longitudinal line is formed approximately at the center of the end wall of the connector pipe. A quartz tube for a heat treatment furnace, characterized in that a directional gas conduit is inserted therethrough and a second gas conduit is provided in the connector tube in a direction perpendicular to the gas conduit. 2. The quartz tube for a heat treatment furnace according to claim 1, wherein the longitudinal gas conduit is formed parallel to and integrally with the thermocouple insertion tube.