JPS52141594A - Semiconductor type pressure transmittor - Google Patents

Semiconductor type pressure transmittor

Info

Publication number
JPS52141594A
JPS52141594A JP941377A JP941377A JPS52141594A JP S52141594 A JPS52141594 A JP S52141594A JP 941377 A JP941377 A JP 941377A JP 941377 A JP941377 A JP 941377A JP S52141594 A JPS52141594 A JP S52141594A
Authority
JP
Japan
Prior art keywords
transmittor
type pressure
semiconductor type
pressure
diaphragm
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP941377A
Other languages
Japanese (ja)
Inventor
Satoshi Shimada
Taisaku Takatsuma
Kazumichi Kimura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP941377A priority Critical patent/JPS52141594A/en
Publication of JPS52141594A publication Critical patent/JPS52141594A/en
Pending legal-status Critical Current

Links

Landscapes

  • Measuring Fluid Pressure (AREA)
  • Pressure Sensors (AREA)

Abstract

PURPOSE: To materialize a reliable pressure transmittor, by arranging a silicon diaphragm and its leading section which is bonded to the former properly so that disconnections of lead wires and damages of the diaphragm are prevented, at the pressure-strain converting section.
COPYRIGHT: (C)1977,JPO&Japio
JP941377A 1977-01-31 1977-01-31 Semiconductor type pressure transmittor Pending JPS52141594A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP941377A JPS52141594A (en) 1977-01-31 1977-01-31 Semiconductor type pressure transmittor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP941377A JPS52141594A (en) 1977-01-31 1977-01-31 Semiconductor type pressure transmittor

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP7176346A Division JPS5112437B2 (en) 1971-10-01 1971-10-01

Publications (1)

Publication Number Publication Date
JPS52141594A true JPS52141594A (en) 1977-11-25

Family

ID=11719694

Family Applications (1)

Application Number Title Priority Date Filing Date
JP941377A Pending JPS52141594A (en) 1977-01-31 1977-01-31 Semiconductor type pressure transmittor

Country Status (1)

Country Link
JP (1) JPS52141594A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6358731U (en) * 1986-10-06 1988-04-19
US5245826A (en) * 1991-09-05 1993-09-21 Mannesmann-Rexroth Gmbh Vibration suppression apparatus for hydraulic system with improved accumulator filing circuit

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6358731U (en) * 1986-10-06 1988-04-19
US5245826A (en) * 1991-09-05 1993-09-21 Mannesmann-Rexroth Gmbh Vibration suppression apparatus for hydraulic system with improved accumulator filing circuit

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