JPS52144384A - Vacuum evaporation - Google Patents

Vacuum evaporation

Info

Publication number
JPS52144384A
JPS52144384A JP6163576A JP6163576A JPS52144384A JP S52144384 A JPS52144384 A JP S52144384A JP 6163576 A JP6163576 A JP 6163576A JP 6163576 A JP6163576 A JP 6163576A JP S52144384 A JPS52144384 A JP S52144384A
Authority
JP
Japan
Prior art keywords
substrate
vacuum evaporation
electrode
impressing
conferring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6163576A
Other languages
Japanese (ja)
Inventor
Toru Tejima
Norimasa Oinuma
Kazuhisa Kato
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Stanley Electric Co Ltd
Original Assignee
Stanley Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Stanley Electric Co Ltd filed Critical Stanley Electric Co Ltd
Priority to JP6163576A priority Critical patent/JPS52144384A/en
Publication of JPS52144384A publication Critical patent/JPS52144384A/en
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

PURPOSE:To generate the corona discharge and to perform the vacuum evaporation while conferring the directional property to the vaporizing substance, by impressing a high voltage of direct (alternate) current between the boat constituted so as to have the electrode of which the electric field intensity becomes larger to the direction of the substrate and the electrostatically shielded substrate, or between the substrate and the electrode.
JP6163576A 1976-05-27 1976-05-27 Vacuum evaporation Pending JPS52144384A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6163576A JPS52144384A (en) 1976-05-27 1976-05-27 Vacuum evaporation

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6163576A JPS52144384A (en) 1976-05-27 1976-05-27 Vacuum evaporation

Publications (1)

Publication Number Publication Date
JPS52144384A true JPS52144384A (en) 1977-12-01

Family

ID=13176843

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6163576A Pending JPS52144384A (en) 1976-05-27 1976-05-27 Vacuum evaporation

Country Status (1)

Country Link
JP (1) JPS52144384A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62288665A (en) * 1986-05-09 1987-12-15 オルダン・ウ−ロ−プ・ソシエテ・アノニム Paint composition and formation of metallized film to surface of article
US5243882A (en) * 1985-02-22 1993-09-14 Jiri Stepan Rotary wire stripper

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5243882A (en) * 1985-02-22 1993-09-14 Jiri Stepan Rotary wire stripper
JPS62288665A (en) * 1986-05-09 1987-12-15 オルダン・ウ−ロ−プ・ソシエテ・アノニム Paint composition and formation of metallized film to surface of article

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