JPS52149062A - Scanning electronic microscope - Google Patents

Scanning electronic microscope

Info

Publication number
JPS52149062A
JPS52149062A JP6558076A JP6558076A JPS52149062A JP S52149062 A JPS52149062 A JP S52149062A JP 6558076 A JP6558076 A JP 6558076A JP 6558076 A JP6558076 A JP 6558076A JP S52149062 A JPS52149062 A JP S52149062A
Authority
JP
Japan
Prior art keywords
electronic microscope
scanning electronic
sample
joining
observation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6558076A
Other languages
Japanese (ja)
Inventor
Shinjiro Katagiri
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP6558076A priority Critical patent/JPS52149062A/en
Publication of JPS52149062A publication Critical patent/JPS52149062A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To obtain a scanning electronic microscope which can have observation to the local defect of a large-size test sample by joining the sample and the vacuum sealing section in accordance with the sample shape.
COPYRIGHT: (C)1977,JPO&Japio
JP6558076A 1976-06-07 1976-06-07 Scanning electronic microscope Pending JPS52149062A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6558076A JPS52149062A (en) 1976-06-07 1976-06-07 Scanning electronic microscope

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6558076A JPS52149062A (en) 1976-06-07 1976-06-07 Scanning electronic microscope

Publications (1)

Publication Number Publication Date
JPS52149062A true JPS52149062A (en) 1977-12-10

Family

ID=13291078

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6558076A Pending JPS52149062A (en) 1976-06-07 1976-06-07 Scanning electronic microscope

Country Status (1)

Country Link
JP (1) JPS52149062A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5638756A (en) * 1979-07-03 1981-04-14 Unisearch Ltd Atmospheric scanning electron microscope
JPS57115751A (en) * 1981-01-08 1982-07-19 Mitsubishi Heavy Ind Ltd Scanning electron microscope
JPS60136048U (en) * 1984-12-27 1985-09-10 三菱重工業株式会社 scanning electron microscope equipment
JPS60136046U (en) * 1984-12-27 1985-09-10 三菱重工業株式会社 scanning electron microscope equipment

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5638756A (en) * 1979-07-03 1981-04-14 Unisearch Ltd Atmospheric scanning electron microscope
JPS57115751A (en) * 1981-01-08 1982-07-19 Mitsubishi Heavy Ind Ltd Scanning electron microscope
JPS60136048U (en) * 1984-12-27 1985-09-10 三菱重工業株式会社 scanning electron microscope equipment
JPS60136046U (en) * 1984-12-27 1985-09-10 三菱重工業株式会社 scanning electron microscope equipment

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