JPS52104865A - X-ray analysis apparatus in electronic microscope or like - Google Patents

X-ray analysis apparatus in electronic microscope or like

Info

Publication number
JPS52104865A
JPS52104865A JP2110576A JP2110576A JPS52104865A JP S52104865 A JPS52104865 A JP S52104865A JP 2110576 A JP2110576 A JP 2110576A JP 2110576 A JP2110576 A JP 2110576A JP S52104865 A JPS52104865 A JP S52104865A
Authority
JP
Japan
Prior art keywords
analysis apparatus
ray analysis
electronic microscope
ray
detecting element
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2110576A
Other languages
Japanese (ja)
Inventor
Tadao Watabe
Moriki Kubozoe
Shigeto Sunakozawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP2110576A priority Critical patent/JPS52104865A/en
Publication of JPS52104865A publication Critical patent/JPS52104865A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To increase the detecting sensitivity for X-ray, by arranging the X-ray detecting element between pole pieces of electron lens so as to be lesser distance between a speciment and the detecting element.
COPYRIGHT: (C)1977,JPO&Japio
JP2110576A 1976-03-01 1976-03-01 X-ray analysis apparatus in electronic microscope or like Pending JPS52104865A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2110576A JPS52104865A (en) 1976-03-01 1976-03-01 X-ray analysis apparatus in electronic microscope or like

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2110576A JPS52104865A (en) 1976-03-01 1976-03-01 X-ray analysis apparatus in electronic microscope or like

Publications (1)

Publication Number Publication Date
JPS52104865A true JPS52104865A (en) 1977-09-02

Family

ID=12045583

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2110576A Pending JPS52104865A (en) 1976-03-01 1976-03-01 X-ray analysis apparatus in electronic microscope or like

Country Status (1)

Country Link
JP (1) JPS52104865A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH076724A (en) * 1993-06-15 1995-01-10 Topcon Corp Analytical electron microscope
JPH0714538A (en) * 1993-06-25 1995-01-17 Topcon Corp Analytical electron microscope

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4917906A (en) * 1972-06-06 1974-02-16
JPS50145174A (en) * 1974-05-10 1975-11-21

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4917906A (en) * 1972-06-06 1974-02-16
JPS50145174A (en) * 1974-05-10 1975-11-21

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH076724A (en) * 1993-06-15 1995-01-10 Topcon Corp Analytical electron microscope
JPH0714538A (en) * 1993-06-25 1995-01-17 Topcon Corp Analytical electron microscope

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