JPS52155059A - Device for high pressure oxidation diffusion for semiconductor - Google Patents

Device for high pressure oxidation diffusion for semiconductor

Info

Publication number: JPS52155059A
Authority: JP; Japan
Prior art keywords: semiconductor; high pressure; pressure oxidation; oxidation diffusion; diffusion
Prior art date: 1976-08-04
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Granted

Application number

JP9228276A

Other languages

English (en)

Japanese (ja)

Other versions

JPS5433954B2 (2

Inventor

Riyouzou Satou

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Tokyo Electron Sagami Ltd

Original Assignee

Tokyo Electron Sagami Ltd

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1976-08-04

Filing date

1976-08-04

Publication date

1977-12-23

1976-08-04 Application filed by Tokyo Electron Sagami Ltd filed Critical Tokyo Electron Sagami Ltd

1976-08-04 Priority to JP9228276A priority Critical patent/JPS52155059A/ja

1977-12-23 Publication of JPS52155059A publication Critical patent/JPS52155059A/ja

1979-10-24 Publication of JPS5433954B2 publication Critical patent/JPS5433954B2/ja

Status Granted legal-status Critical Current

Links

238000009792 diffusion process Methods 0.000 title 1
230000003647 oxidation Effects 0.000 title 1
238000007254 oxidation reaction Methods 0.000 title 1
239000004065 semiconductor Substances 0.000 title 1

JP9228276A 1976-08-04 1976-08-04 Device for high pressure oxidation diffusion for semiconductor Granted JPS52155059A (en)

Priority Applications (1)

Application Number	Priority Date	Filing Date	Title
JP9228276A JPS52155059A (en)	1976-08-04	1976-08-04	Device for high pressure oxidation diffusion for semiconductor

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
JP9228276A JPS52155059A (en)	1976-08-04	1976-08-04	Device for high pressure oxidation diffusion for semiconductor

Publications (2)

Publication Number	Publication Date
JPS52155059A true JPS52155059A (en)	1977-12-23
JPS5433954B2 JPS5433954B2 (2)	1979-10-24

Family

ID=14050037

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
JP9228276A Granted JPS52155059A (en)	1976-08-04	1976-08-04	Device for high pressure oxidation diffusion for semiconductor

Country Status (1)

Country	Link
JP (1)	JPS52155059A (2)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPS6092827U (ja) *	1983-11-30	1985-06-25	富士通株式会社	熱処理炉
JPS6224630A (ja) *	1985-07-24	1987-02-02	Mitsubishi Electric Corp	熱酸化膜形成方法及びその装置
JPH01280320A (ja) *	1988-05-06	1989-11-10	Tel Sagami Ltd	半導体加圧酸化方法

1976
- 1976-08-04 JP JP9228276A patent/JPS52155059A/ja active Granted

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPS6092827U (ja) *	1983-11-30	1985-06-25	富士通株式会社	熱処理炉
JPS6224630A (ja) *	1985-07-24	1987-02-02	Mitsubishi Electric Corp	熱酸化膜形成方法及びその装置
JPH01280320A (ja) *	1988-05-06	1989-11-10	Tel Sagami Ltd	半導体加圧酸化方法

Also Published As

Publication number	Publication date
JPS5433954B2 (2)	1979-10-24

Similar Documents

Publication	Publication Date	Title
JPS5320774A (en)	1978-02-25	Semiconductor device
JPS535965A (en)	1978-01-19	Semiconductor device
JPS5298483A (en)	1977-08-18	Semiconductor device
JPS5342580A (en)	1978-04-18	Semiconductor device
JPS5297689A (en)	1977-08-16	Semiconductor device
JPS52138880A (en)	1977-11-19	Selffprotecting semiconductor device
JPS5323531A (en)	1978-03-04	Semiconductor device
JPS52129378A (en)	1977-10-29	Semiconductor device
JPS52110575A (en)	1977-09-16	Threeeterminal semiconductor device
JPS5327370A (en)	1978-03-14	Semiconductor device
JPS52114273A (en)	1977-09-24	Pressure contact type semiconductor device
JPS5343483A (en)	1978-04-19	Semiconductor device
JPS5329078A (en)	1978-03-17	Semiconductor device
JPS52150985A (en)	1977-12-15	Semiconductor device
GB1538650A (en)	1979-01-24	Semiconductor device
JPS52155059A (en)	1977-12-23	Device for high pressure oxidation diffusion for semiconductor
GB1540559A (en)	1979-02-14	Semiconductor device
JPS5310267A (en)	1978-01-30	Semiconductor device
JPS52154360A (en)	1977-12-22	Device for high pressure oxidatioon diffusion for semiconductor
JPS5289363A (en)	1977-07-26	Diffusion type semiconductor pressure sensor
JPS5354490A (en)	1978-05-17	Semiconductor device
JPS52147072A (en)	1977-12-07	Semiconductor device
JPS52155061A (en)	1977-12-23	Device for high pressure oxidation diffusion for semiconductor
JPS52144352A (en)	1977-12-01	Diffusion bonding device
JPS5332368A (en)	1978-03-27	Semiconductor device case