JPS52155397A - Production method of highly resistive thin film - Google Patents

Production method of highly resistive thin film

Info

Publication number
JPS52155397A
JPS52155397A JP7215776A JP7215776A JPS52155397A JP S52155397 A JPS52155397 A JP S52155397A JP 7215776 A JP7215776 A JP 7215776A JP 7215776 A JP7215776 A JP 7215776A JP S52155397 A JPS52155397 A JP S52155397A
Authority
JP
Japan
Prior art keywords
thin film
production method
highly resistive
resistive thin
separating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7215776A
Other languages
Japanese (ja)
Inventor
Taiji Shimomoto
Yasuo Tanaka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP7215776A priority Critical patent/JPS52155397A/en
Publication of JPS52155397A publication Critical patent/JPS52155397A/en
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Apparatuses And Processes For Manufacturing Resistors (AREA)

Abstract

PURPOSE: To obtain uniformly composed Ta-Al-system thin film by separating target of Ta, Al while separating Ta, Al and forming thin film while rotating substrate holder.
COPYRIGHT: (C)1977,JPO&Japio
JP7215776A 1976-06-21 1976-06-21 Production method of highly resistive thin film Pending JPS52155397A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7215776A JPS52155397A (en) 1976-06-21 1976-06-21 Production method of highly resistive thin film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7215776A JPS52155397A (en) 1976-06-21 1976-06-21 Production method of highly resistive thin film

Publications (1)

Publication Number Publication Date
JPS52155397A true JPS52155397A (en) 1977-12-23

Family

ID=13481128

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7215776A Pending JPS52155397A (en) 1976-06-21 1976-06-21 Production method of highly resistive thin film

Country Status (1)

Country Link
JP (1) JPS52155397A (en)

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