JPS52175A - Loader/unloader - Google Patents

Loader/unloader

Info

Publication number
JPS52175A
JPS52175A JP50075597A JP7559775A JPS52175A JP S52175 A JPS52175 A JP S52175A JP 50075597 A JP50075597 A JP 50075597A JP 7559775 A JP7559775 A JP 7559775A JP S52175 A JPS52175 A JP S52175A
Authority
JP
Japan
Prior art keywords
loader
unloader
wafer
eliminate
damage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP50075597A
Other languages
Japanese (ja)
Inventor
Tamotsu Sasaki
Toshio Hashimoto
Katsunori Kameyama
Akira Minoguchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP50075597A priority Critical patent/JPS52175A/en
Publication of JPS52175A publication Critical patent/JPS52175A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To eliminate a damage of a wafer in treatment by providing a prealignment mechanism utilizing an air injection at the forward position of a conveyor connected to a loader.
JP50075597A 1975-06-23 1975-06-23 Loader/unloader Pending JPS52175A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50075597A JPS52175A (en) 1975-06-23 1975-06-23 Loader/unloader

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50075597A JPS52175A (en) 1975-06-23 1975-06-23 Loader/unloader

Publications (1)

Publication Number Publication Date
JPS52175A true JPS52175A (en) 1977-01-05

Family

ID=13580760

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50075597A Pending JPS52175A (en) 1975-06-23 1975-06-23 Loader/unloader

Country Status (1)

Country Link
JP (1) JPS52175A (en)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4954791A (en) * 1972-09-27 1974-05-28
JPS5021682A (en) * 1973-05-21 1975-03-07

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4954791A (en) * 1972-09-27 1974-05-28
JPS5021682A (en) * 1973-05-21 1975-03-07

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