JPS5224873B2 - - Google Patents
Info
- Publication number
- JPS5224873B2 JPS5224873B2 JP10366971A JP10366971A JPS5224873B2 JP S5224873 B2 JPS5224873 B2 JP S5224873B2 JP 10366971 A JP10366971 A JP 10366971A JP 10366971 A JP10366971 A JP 10366971A JP S5224873 B2 JPS5224873 B2 JP S5224873B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Measuring Fluid Pressure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10366971A JPS5224873B2 (ja) | 1971-12-22 | 1971-12-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10366971A JPS5224873B2 (ja) | 1971-12-22 | 1971-12-22 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4869572A JPS4869572A (ja) | 1973-09-21 |
| JPS5224873B2 true JPS5224873B2 (ja) | 1977-07-04 |
Family
ID=14360183
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10366971A Expired JPS5224873B2 (ja) | 1971-12-22 | 1971-12-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5224873B2 (ja) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57128042A (en) * | 1981-01-30 | 1982-08-09 | Fujitsu Ltd | Inspecting method for semiconductor device |
| JPS62190844A (ja) * | 1986-02-18 | 1987-08-21 | Fujitsu Ltd | 低温用プロ−バ |
-
1971
- 1971-12-22 JP JP10366971A patent/JPS5224873B2/ja not_active Expired
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57128042A (en) * | 1981-01-30 | 1982-08-09 | Fujitsu Ltd | Inspecting method for semiconductor device |
| JPS62190844A (ja) * | 1986-02-18 | 1987-08-21 | Fujitsu Ltd | 低温用プロ−バ |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS4869572A (ja) | 1973-09-21 |