JPS5227276A - Glass mask holder - Google Patents

Glass mask holder

Info

Publication number
JPS5227276A
JPS5227276A JP10327175A JP10327175A JPS5227276A JP S5227276 A JPS5227276 A JP S5227276A JP 10327175 A JP10327175 A JP 10327175A JP 10327175 A JP10327175 A JP 10327175A JP S5227276 A JPS5227276 A JP S5227276A
Authority
JP
Japan
Prior art keywords
glass mask
mask holder
wafer
glass
bend
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10327175A
Other languages
Japanese (ja)
Inventor
Tsugumitsu Miyasaka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Suwa Seikosha KK
Original Assignee
Seiko Epson Corp
Suwa Seikosha KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp, Suwa Seikosha KK filed Critical Seiko Epson Corp
Priority to JP10327175A priority Critical patent/JPS5227276A/en
Publication of JPS5227276A publication Critical patent/JPS5227276A/en
Pending legal-status Critical Current

Links

Landscapes

  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)

Abstract

PURPOSE: To bend a glass mask toward a wafer surface for semiconductor formation, press the mask against the wafer and fix them tightly, thus enabling fine patterning.
COPYRIGHT: (C)1977,JPO&Japio
JP10327175A 1975-08-26 1975-08-26 Glass mask holder Pending JPS5227276A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10327175A JPS5227276A (en) 1975-08-26 1975-08-26 Glass mask holder

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10327175A JPS5227276A (en) 1975-08-26 1975-08-26 Glass mask holder

Publications (1)

Publication Number Publication Date
JPS5227276A true JPS5227276A (en) 1977-03-01

Family

ID=14349726

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10327175A Pending JPS5227276A (en) 1975-08-26 1975-08-26 Glass mask holder

Country Status (1)

Country Link
JP (1) JPS5227276A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5591124A (en) * 1978-12-27 1980-07-10 Nec Kyushu Ltd Alignment matching exposure apparatus

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5591124A (en) * 1978-12-27 1980-07-10 Nec Kyushu Ltd Alignment matching exposure apparatus

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