JPS5294070A - Process for preparing semi-conductor - Google Patents

Process for preparing semi-conductor

Info

Publication number
JPS5294070A
JPS5294070A JP1098976A JP1098976A JPS5294070A JP S5294070 A JPS5294070 A JP S5294070A JP 1098976 A JP1098976 A JP 1098976A JP 1098976 A JP1098976 A JP 1098976A JP S5294070 A JPS5294070 A JP S5294070A
Authority
JP
Japan
Prior art keywords
conductor
preparing semi
semi
preparing
ohmic contact
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1098976A
Other languages
Japanese (ja)
Inventor
Hiroshi Asami
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Home Electronics Ltd
NEC Corp
Original Assignee
NEC Home Electronics Ltd
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Home Electronics Ltd, Nippon Electric Co Ltd filed Critical NEC Home Electronics Ltd
Priority to JP1098976A priority Critical patent/JPS5294070A/en
Publication of JPS5294070A publication Critical patent/JPS5294070A/en
Pending legal-status Critical Current

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Landscapes

  • Electrodes Of Semiconductors (AREA)

Abstract

PURPOSE: To effect high ohmic contact by roughening base surface.
COPYRIGHT: (C)1977,JPO&Japio
JP1098976A 1976-02-03 1976-02-03 Process for preparing semi-conductor Pending JPS5294070A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1098976A JPS5294070A (en) 1976-02-03 1976-02-03 Process for preparing semi-conductor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1098976A JPS5294070A (en) 1976-02-03 1976-02-03 Process for preparing semi-conductor

Publications (1)

Publication Number Publication Date
JPS5294070A true JPS5294070A (en) 1977-08-08

Family

ID=11765549

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1098976A Pending JPS5294070A (en) 1976-02-03 1976-02-03 Process for preparing semi-conductor

Country Status (1)

Country Link
JP (1) JPS5294070A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003168653A (en) * 2001-12-03 2003-06-13 Matsushita Electric Ind Co Ltd Semiconductor device and method of manufacturing the same
US7108746B2 (en) * 2001-05-18 2006-09-19 Integrated Materials, Inc. Silicon fixture with roughened surface supporting wafers in chemical vapor deposition

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7108746B2 (en) * 2001-05-18 2006-09-19 Integrated Materials, Inc. Silicon fixture with roughened surface supporting wafers in chemical vapor deposition
JP2003168653A (en) * 2001-12-03 2003-06-13 Matsushita Electric Ind Co Ltd Semiconductor device and method of manufacturing the same

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