JPS5228274A - Containing method of wafer to magazine - Google Patents

Containing method of wafer to magazine

Info

Publication number
JPS5228274A
JPS5228274A JP10399275A JP10399275A JPS5228274A JP S5228274 A JPS5228274 A JP S5228274A JP 10399275 A JP10399275 A JP 10399275A JP 10399275 A JP10399275 A JP 10399275A JP S5228274 A JPS5228274 A JP S5228274A
Authority
JP
Japan
Prior art keywords
magazine
wafer
containing method
unloader
loader
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10399275A
Other languages
Japanese (ja)
Inventor
Hiroto Nagatomo
Susumu Nanko
Hiroshi Maejima
Jun Suzuki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP10399275A priority Critical patent/JPS5228274A/en
Publication of JPS5228274A publication Critical patent/JPS5228274A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To be convenient on the process control by becoming to same for the contained state of loader and unloader after the process.
COPYRIGHT: (C)1977,JPO&Japio
JP10399275A 1975-08-29 1975-08-29 Containing method of wafer to magazine Pending JPS5228274A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10399275A JPS5228274A (en) 1975-08-29 1975-08-29 Containing method of wafer to magazine

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10399275A JPS5228274A (en) 1975-08-29 1975-08-29 Containing method of wafer to magazine

Publications (1)

Publication Number Publication Date
JPS5228274A true JPS5228274A (en) 1977-03-03

Family

ID=14368782

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10399275A Pending JPS5228274A (en) 1975-08-29 1975-08-29 Containing method of wafer to magazine

Country Status (1)

Country Link
JP (1) JPS5228274A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5951657U (en) * 1982-09-30 1984-04-05 日本電気ホームエレクトロニクス株式会社 Shock absorber
JPS60134425A (en) * 1983-12-22 1985-07-17 Toshiba Corp Magnetic card for wafer process control and wafer process controlling method
US4685852A (en) * 1985-05-20 1987-08-11 Machine Technology, Inc. Process apparatus and method and elevator mechanism for use in connection therewith
JPH01170013A (en) * 1987-12-25 1989-07-05 Teru Kyushu Kk Wafer transfer method

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5951657U (en) * 1982-09-30 1984-04-05 日本電気ホームエレクトロニクス株式会社 Shock absorber
JPS60134425A (en) * 1983-12-22 1985-07-17 Toshiba Corp Magnetic card for wafer process control and wafer process controlling method
US4685852A (en) * 1985-05-20 1987-08-11 Machine Technology, Inc. Process apparatus and method and elevator mechanism for use in connection therewith
JPH01170013A (en) * 1987-12-25 1989-07-05 Teru Kyushu Kk Wafer transfer method

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