JPS5242365A - Tool for semiconductors - Google Patents

Tool for semiconductors

Info

Publication number
JPS5242365A
JPS5242365A JP11805875A JP11805875A JPS5242365A JP S5242365 A JPS5242365 A JP S5242365A JP 11805875 A JP11805875 A JP 11805875A JP 11805875 A JP11805875 A JP 11805875A JP S5242365 A JPS5242365 A JP S5242365A
Authority
JP
Japan
Prior art keywords
tool
semiconductors
silicon wafers
prevent contamination
inexpensive tool
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11805875A
Other languages
Japanese (ja)
Other versions
JPS5950086B2 (en
Inventor
Kazunari Ban
Teruyasu Tamamizu
Yukitoshi Matsuo
Hidekazu Taji
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Coorstek KK
Original Assignee
Toshiba Ceramics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Ceramics Co Ltd filed Critical Toshiba Ceramics Co Ltd
Priority to JP11805875A priority Critical patent/JPS5950086B2/en
Publication of JPS5242365A publication Critical patent/JPS5242365A/en
Publication of JPS5950086B2 publication Critical patent/JPS5950086B2/en
Expired legal-status Critical Current

Links

Landscapes

  • Weting (AREA)

Abstract

PURPOSE: To obtain an inexpensive tool that can prevent contamination of silicon wafers.
COPYRIGHT: (C)1977,JPO&Japio
JP11805875A 1975-09-30 1975-09-30 Semiconductor jig Expired JPS5950086B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11805875A JPS5950086B2 (en) 1975-09-30 1975-09-30 Semiconductor jig

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11805875A JPS5950086B2 (en) 1975-09-30 1975-09-30 Semiconductor jig

Publications (2)

Publication Number Publication Date
JPS5242365A true JPS5242365A (en) 1977-04-01
JPS5950086B2 JPS5950086B2 (en) 1984-12-06

Family

ID=14726962

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11805875A Expired JPS5950086B2 (en) 1975-09-30 1975-09-30 Semiconductor jig

Country Status (1)

Country Link
JP (1) JPS5950086B2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5017206A (en) * 1973-06-12 1975-02-24
JPS55154437A (en) * 1979-04-14 1980-12-02 Max Planck Gesellschaft Indicator cell for measuring optical change of indicator

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62138378U (en) * 1986-02-26 1987-09-01

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5017206A (en) * 1973-06-12 1975-02-24
JPS55154437A (en) * 1979-04-14 1980-12-02 Max Planck Gesellschaft Indicator cell for measuring optical change of indicator

Also Published As

Publication number Publication date
JPS5950086B2 (en) 1984-12-06

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