JPS524255A - Physical factor measuring system - Google Patents

Physical factor measuring system

Info

Publication number
JPS524255A
JPS524255A JP8063075A JP8063075A JPS524255A JP S524255 A JPS524255 A JP S524255A JP 8063075 A JP8063075 A JP 8063075A JP 8063075 A JP8063075 A JP 8063075A JP S524255 A JPS524255 A JP S524255A
Authority
JP
Japan
Prior art keywords
physical factor
light path
measuring system
factor measuring
cross
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8063075A
Other languages
Japanese (ja)
Other versions
JPS5916643B2 (en
Inventor
Nobuyoshi Tanaka
Naoki Ayada
Mitsuo Takeda
Susumu Matsumura
Kazuya Matsumoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP8063075A priority Critical patent/JPS5916643B2/en
Publication of JPS524255A publication Critical patent/JPS524255A/en
Publication of JPS5916643B2 publication Critical patent/JPS5916643B2/en
Expired legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)

Abstract

PURPOSE: The cross meter divides the light path, of which one light path length is changed unrelevant to frequency change. The span base position and cross peak is matched by changing the light path, which is used to measure the physical factor without influence from the vibration mirror non-linearity.
COPYRIGHT: (C)1977,JPO&Japio
JP8063075A 1975-06-28 1975-06-28 How to measure the physical constants of a measured object Expired JPS5916643B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8063075A JPS5916643B2 (en) 1975-06-28 1975-06-28 How to measure the physical constants of a measured object

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8063075A JPS5916643B2 (en) 1975-06-28 1975-06-28 How to measure the physical constants of a measured object

Publications (2)

Publication Number Publication Date
JPS524255A true JPS524255A (en) 1977-01-13
JPS5916643B2 JPS5916643B2 (en) 1984-04-17

Family

ID=13723665

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8063075A Expired JPS5916643B2 (en) 1975-06-28 1975-06-28 How to measure the physical constants of a measured object

Country Status (1)

Country Link
JP (1) JPS5916643B2 (en)

Also Published As

Publication number Publication date
JPS5916643B2 (en) 1984-04-17

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