JPS524256A - Physical factor measuring system - Google Patents

Physical factor measuring system

Info

Publication number
JPS524256A
JPS524256A JP8063175A JP8063175A JPS524256A JP S524256 A JPS524256 A JP S524256A JP 8063175 A JP8063175 A JP 8063175A JP 8063175 A JP8063175 A JP 8063175A JP S524256 A JPS524256 A JP S524256A
Authority
JP
Japan
Prior art keywords
measuring system
thickness
physical factor
factor measuring
illuminates
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8063175A
Other languages
Japanese (ja)
Other versions
JPS566481B2 (en
Inventor
Nobuyoshi Tanaka
Naoki Ayada
Mitsuo Takeda
Susumu Matsumura
Kazuya Matsumoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP8063175A priority Critical patent/JPS524256A/en
Publication of JPS524256A publication Critical patent/JPS524256A/en
Publication of JPS566481B2 publication Critical patent/JPS566481B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)

Abstract

PURPOSE: A light beam with a thickness of the wavelength illuminates the basic piece with thickness and reflection factor known. The reflection beam from the basic piece illuminates the measured object. In this system, thickness or reflection factor can be measured without widely changing the light path length in the case of a thick object.
COPYRIGHT: (C)1977,JPO&Japio
JP8063175A 1975-06-28 1975-06-28 Physical factor measuring system Granted JPS524256A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8063175A JPS524256A (en) 1975-06-28 1975-06-28 Physical factor measuring system

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8063175A JPS524256A (en) 1975-06-28 1975-06-28 Physical factor measuring system

Publications (2)

Publication Number Publication Date
JPS524256A true JPS524256A (en) 1977-01-13
JPS566481B2 JPS566481B2 (en) 1981-02-12

Family

ID=13723696

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8063175A Granted JPS524256A (en) 1975-06-28 1975-06-28 Physical factor measuring system

Country Status (1)

Country Link
JP (1) JPS524256A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5341205A (en) * 1991-01-15 1994-08-23 The United States Of America As Represented By The Secretary Of The Navy Method for characterization of optical waveguide devices using partial coherence interferometry
JP2008292296A (en) * 2007-05-24 2008-12-04 Toray Eng Co Ltd Method and apparatus for measuring film thickness of transparent film
JP2008309638A (en) * 2007-06-14 2008-12-25 National Institute Of Advanced Industrial & Technology Dimension measuring apparatus and dimension measuring method

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5341205A (en) * 1991-01-15 1994-08-23 The United States Of America As Represented By The Secretary Of The Navy Method for characterization of optical waveguide devices using partial coherence interferometry
JP2008292296A (en) * 2007-05-24 2008-12-04 Toray Eng Co Ltd Method and apparatus for measuring film thickness of transparent film
JP2008309638A (en) * 2007-06-14 2008-12-25 National Institute Of Advanced Industrial & Technology Dimension measuring apparatus and dimension measuring method

Also Published As

Publication number Publication date
JPS566481B2 (en) 1981-02-12

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