JPS5253448A - Measuring device - Google Patents

Measuring device

Info

Publication number
JPS5253448A
JPS5253448A JP50129106A JP12910675A JPS5253448A JP S5253448 A JPS5253448 A JP S5253448A JP 50129106 A JP50129106 A JP 50129106A JP 12910675 A JP12910675 A JP 12910675A JP S5253448 A JPS5253448 A JP S5253448A
Authority
JP
Japan
Prior art keywords
measuring device
interferelnce
fringes
permitting
rapidly
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP50129106A
Other languages
Japanese (ja)
Other versions
JPS5911843B2 (en
Inventor
Nobuyoshi Tanaka
Kazuya Matsumoto
Mitsuo Takeda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP50129106A priority Critical patent/JPS5911843B2/en
Priority to US05/734,245 priority patent/US4072422A/en
Publication of JPS5253448A publication Critical patent/JPS5253448A/en
Publication of JPS5911843B2 publication Critical patent/JPS5911843B2/en
Expired legal-status Critical Current

Links

Landscapes

  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)

Abstract

PURPOSE: To measure simply and rapidly the thickness, refractive index or the like of the object being measured in a non-contact and - destructive manner by permitting luminous fluxes having a wave width to fall on the object to form interferelnce fringes by the transmitted and reflected light.
COPYRIGHT: (C)1977,JPO&Japio
JP50129106A 1975-10-27 1975-10-27 Sokutei Souchi Expired JPS5911843B2 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP50129106A JPS5911843B2 (en) 1975-10-27 1975-10-27 Sokutei Souchi
US05/734,245 US4072422A (en) 1975-10-27 1976-10-20 Apparatus for interferometrically measuring the physical properties of test object

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50129106A JPS5911843B2 (en) 1975-10-27 1975-10-27 Sokutei Souchi

Publications (2)

Publication Number Publication Date
JPS5253448A true JPS5253448A (en) 1977-04-30
JPS5911843B2 JPS5911843B2 (en) 1984-03-19

Family

ID=15001208

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50129106A Expired JPS5911843B2 (en) 1975-10-27 1975-10-27 Sokutei Souchi

Country Status (1)

Country Link
JP (1) JPS5911843B2 (en)

Also Published As

Publication number Publication date
JPS5911843B2 (en) 1984-03-19

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