JPS5247372A - Process for production of semiconductor de vice - Google Patents

Process for production of semiconductor de vice

Info

Publication number
JPS5247372A
JPS5247372A JP12337575A JP12337575A JPS5247372A JP S5247372 A JPS5247372 A JP S5247372A JP 12337575 A JP12337575 A JP 12337575A JP 12337575 A JP12337575 A JP 12337575A JP S5247372 A JPS5247372 A JP S5247372A
Authority
JP
Japan
Prior art keywords
vice
semiconductor
production
etched
integration
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12337575A
Other languages
Japanese (ja)
Inventor
Kiyoto Iida
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP12337575A priority Critical patent/JPS5247372A/en
Publication of JPS5247372A publication Critical patent/JPS5247372A/en
Pending legal-status Critical Current

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  • Electrodes Of Semiconductors (AREA)

Abstract

PURPOSE: To obtain extra-fine wiring of an IC device at high reliability and high scale of integration by using an alumina film which may be etched by phosphoric acid base etching solutions.
COPYRIGHT: (C)1977,JPO&Japio
JP12337575A 1975-10-13 1975-10-13 Process for production of semiconductor de vice Pending JPS5247372A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12337575A JPS5247372A (en) 1975-10-13 1975-10-13 Process for production of semiconductor de vice

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12337575A JPS5247372A (en) 1975-10-13 1975-10-13 Process for production of semiconductor de vice

Publications (1)

Publication Number Publication Date
JPS5247372A true JPS5247372A (en) 1977-04-15

Family

ID=14859018

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12337575A Pending JPS5247372A (en) 1975-10-13 1975-10-13 Process for production of semiconductor de vice

Country Status (1)

Country Link
JP (1) JPS5247372A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5185277A (en) * 1990-06-12 1993-02-09 Thomson Composants Microondes Method for the making of a transistor gate
US5783078A (en) * 1996-10-12 1998-07-21 Dana Corporation Fuel/water separator filter without flow diverters and method of making same

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5185277A (en) * 1990-06-12 1993-02-09 Thomson Composants Microondes Method for the making of a transistor gate
US5783078A (en) * 1996-10-12 1998-07-21 Dana Corporation Fuel/water separator filter without flow diverters and method of making same

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