JPS5247372A - Process for production of semiconductor de vice - Google Patents
Process for production of semiconductor de viceInfo
- Publication number
- JPS5247372A JPS5247372A JP12337575A JP12337575A JPS5247372A JP S5247372 A JPS5247372 A JP S5247372A JP 12337575 A JP12337575 A JP 12337575A JP 12337575 A JP12337575 A JP 12337575A JP S5247372 A JPS5247372 A JP S5247372A
- Authority
- JP
- Japan
- Prior art keywords
- vice
- semiconductor
- production
- etched
- integration
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 title 1
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 abstract 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 abstract 1
- 229910000147 aluminium phosphate Inorganic materials 0.000 abstract 1
- 238000005530 etching Methods 0.000 abstract 1
- 230000010354 integration Effects 0.000 abstract 1
Landscapes
- Electrodes Of Semiconductors (AREA)
Abstract
PURPOSE: To obtain extra-fine wiring of an IC device at high reliability and high scale of integration by using an alumina film which may be etched by phosphoric acid base etching solutions.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12337575A JPS5247372A (en) | 1975-10-13 | 1975-10-13 | Process for production of semiconductor de vice |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12337575A JPS5247372A (en) | 1975-10-13 | 1975-10-13 | Process for production of semiconductor de vice |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5247372A true JPS5247372A (en) | 1977-04-15 |
Family
ID=14859018
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12337575A Pending JPS5247372A (en) | 1975-10-13 | 1975-10-13 | Process for production of semiconductor de vice |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5247372A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5185277A (en) * | 1990-06-12 | 1993-02-09 | Thomson Composants Microondes | Method for the making of a transistor gate |
| US5783078A (en) * | 1996-10-12 | 1998-07-21 | Dana Corporation | Fuel/water separator filter without flow diverters and method of making same |
-
1975
- 1975-10-13 JP JP12337575A patent/JPS5247372A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5185277A (en) * | 1990-06-12 | 1993-02-09 | Thomson Composants Microondes | Method for the making of a transistor gate |
| US5783078A (en) * | 1996-10-12 | 1998-07-21 | Dana Corporation | Fuel/water separator filter without flow diverters and method of making same |
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