JPS5247687A - Process for production of mis type semiconductor device - Google Patents

Process for production of mis type semiconductor device

Info

Publication number
JPS5247687A
JPS5247687A JP12390875A JP12390875A JPS5247687A JP S5247687 A JPS5247687 A JP S5247687A JP 12390875 A JP12390875 A JP 12390875A JP 12390875 A JP12390875 A JP 12390875A JP S5247687 A JPS5247687 A JP S5247687A
Authority
JP
Japan
Prior art keywords
production
semiconductor device
type semiconductor
mis type
mis
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12390875A
Other languages
Japanese (ja)
Inventor
Kenji Ichida
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP12390875A priority Critical patent/JPS5247687A/en
Publication of JPS5247687A publication Critical patent/JPS5247687A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To make a poly Si film for gate at high accuracy in a desired region by conventional photoetching techniques, thereby considerably reducing leak current.
COPYRIGHT: (C)1977,JPO&Japio
JP12390875A 1975-10-15 1975-10-15 Process for production of mis type semiconductor device Pending JPS5247687A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12390875A JPS5247687A (en) 1975-10-15 1975-10-15 Process for production of mis type semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12390875A JPS5247687A (en) 1975-10-15 1975-10-15 Process for production of mis type semiconductor device

Publications (1)

Publication Number Publication Date
JPS5247687A true JPS5247687A (en) 1977-04-15

Family

ID=14872309

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12390875A Pending JPS5247687A (en) 1975-10-15 1975-10-15 Process for production of mis type semiconductor device

Country Status (1)

Country Link
JP (1) JPS5247687A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5530276A (en) * 1993-01-21 1996-06-25 Nippon Steel Corporation Nonvolatile semiconductor memory device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5530276A (en) * 1993-01-21 1996-06-25 Nippon Steel Corporation Nonvolatile semiconductor memory device

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