JPS524887A - Optical surface scar inspector - Google Patents

Optical surface scar inspector

Info

Publication number
JPS524887A
JPS524887A JP8134075A JP8134075A JPS524887A JP S524887 A JPS524887 A JP S524887A JP 8134075 A JP8134075 A JP 8134075A JP 8134075 A JP8134075 A JP 8134075A JP S524887 A JPS524887 A JP S524887A
Authority
JP
Japan
Prior art keywords
inspector
optical surface
surface scar
light receiving
scar
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8134075A
Other languages
Japanese (ja)
Inventor
Masanori Ozawa
Daisuke Ozaki
Yasufumi Tanaka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sanyo Machine Works Ltd
Original Assignee
Sanyo Machine Works Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sanyo Machine Works Ltd filed Critical Sanyo Machine Works Ltd
Priority to JP8134075A priority Critical patent/JPS524887A/en
Publication of JPS524887A publication Critical patent/JPS524887A/en
Pending legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Examining Or Testing Airtightness (AREA)

Abstract

PURPOSE: Inspection surface is illuminated by projectors and the light receiving surface of the light receiving equipment is constituted by photoelectric elements to resemble visual inspection methods in order to increase reliability and to distinguish the largeness of scars.
COPYRIGHT: (C)1977,JPO&Japio
JP8134075A 1975-06-30 1975-06-30 Optical surface scar inspector Pending JPS524887A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8134075A JPS524887A (en) 1975-06-30 1975-06-30 Optical surface scar inspector

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8134075A JPS524887A (en) 1975-06-30 1975-06-30 Optical surface scar inspector

Publications (1)

Publication Number Publication Date
JPS524887A true JPS524887A (en) 1977-01-14

Family

ID=13743630

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8134075A Pending JPS524887A (en) 1975-06-30 1975-06-30 Optical surface scar inspector

Country Status (1)

Country Link
JP (1) JPS524887A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5671173A (en) * 1979-11-14 1981-06-13 Hitachi Ltd Pattern detection method of printed circuit substrate
JPS57124244A (en) * 1981-01-26 1982-08-03 Nippon Kokan Kk <Nkk> Detection for surface flaw of steel product
JPS6162844A (en) * 1984-09-05 1986-03-31 Sumitomo Bakelite Co Ltd Method for inspecting surface appearance of semiconductive resin sealed molded product
US4687107A (en) * 1985-05-02 1987-08-18 Pennwalt Corporation Apparatus for sizing and sorting articles

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5671173A (en) * 1979-11-14 1981-06-13 Hitachi Ltd Pattern detection method of printed circuit substrate
JPS57124244A (en) * 1981-01-26 1982-08-03 Nippon Kokan Kk <Nkk> Detection for surface flaw of steel product
JPS6162844A (en) * 1984-09-05 1986-03-31 Sumitomo Bakelite Co Ltd Method for inspecting surface appearance of semiconductive resin sealed molded product
US4687107A (en) * 1985-05-02 1987-08-18 Pennwalt Corporation Apparatus for sizing and sorting articles

Similar Documents

Publication Publication Date Title
JPS51131378A (en) Color dissolution device
JPS5212577A (en) Automatic location device
JPS5276088A (en) System for inspecting defects of pattern having directivity
JPS5417744A (en) Linear lighting method
JPS524887A (en) Optical surface scar inspector
JPS5271289A (en) Surface inspection device
JPS51112183A (en) Diffraction pattern detector
JPS5214477A (en) Method to detect a defect in a transparent test object
JPS53120552A (en) Evaluation method of plating surface
JPS5434262A (en) Detector of moving objects
JPS53146698A (en) Printed matter inspecting apparatus
JPS5232228A (en) Keyboard testing equipment
JPS5382451A (en) Method and apparatus of comparing and inspecting surface roughness
JPS5222479A (en) Method of inspecting masks
JPS5362546A (en) Measuring method and apparatus of propagation characteristics of optical guide
JPS51143343A (en) Optical instrument
JPS5231674A (en) Defects pattern detection system
JPS5273464A (en) Apparatus for lining up
JPS5379102A (en) Illuminating method and apparatus for inspection poins in an engine room
JPS51142311A (en) Method for examining a visual function by leadinga visual line in an o phthalmological instrument
JPS5288050A (en) Transparent object detecting method
JPS52114355A (en) Apparatus for and method of analyzing image
JPS51141692A (en) Lubricating oil deterioration test and instrument therefor
JPS525219A (en) Image pick up device
JPS5381151A (en) Surface film thickness detector