JPS52488A - Apparatus for composite analysis - Google Patents

Apparatus for composite analysis

Info

Publication number
JPS52488A
JPS52488A JP50075583A JP7558375A JPS52488A JP S52488 A JPS52488 A JP S52488A JP 50075583 A JP50075583 A JP 50075583A JP 7558375 A JP7558375 A JP 7558375A JP S52488 A JPS52488 A JP S52488A
Authority
JP
Japan
Prior art keywords
composite analysis
analysis
analizer
electrons
ions
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP50075583A
Other languages
Japanese (ja)
Inventor
Toru Ishitani
Hifumi Tamura
Ryuichi Shimizu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP50075583A priority Critical patent/JPS52488A/en
Publication of JPS52488A publication Critical patent/JPS52488A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/225—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)

Abstract

PURPOSE:Device for performing high-resolving analysis with a simple construction using a spherical barrier electrode analizer in case of performing solid analysis based on ions and electrons.
JP50075583A 1975-06-23 1975-06-23 Apparatus for composite analysis Pending JPS52488A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50075583A JPS52488A (en) 1975-06-23 1975-06-23 Apparatus for composite analysis

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50075583A JPS52488A (en) 1975-06-23 1975-06-23 Apparatus for composite analysis

Publications (1)

Publication Number Publication Date
JPS52488A true JPS52488A (en) 1977-01-05

Family

ID=13580348

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50075583A Pending JPS52488A (en) 1975-06-23 1975-06-23 Apparatus for composite analysis

Country Status (1)

Country Link
JP (1) JPS52488A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4849629A (en) * 1986-11-14 1989-07-18 Shimadzu Corporation Charged particle analyzer

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4849629A (en) * 1986-11-14 1989-07-18 Shimadzu Corporation Charged particle analyzer

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