JPS5250160A - Processing method of semiconductor unit or semiconductor unit parts - Google Patents

Processing method of semiconductor unit or semiconductor unit parts

Info

Publication number
JPS5250160A
JPS5250160A JP12652275A JP12652275A JPS5250160A JP S5250160 A JPS5250160 A JP S5250160A JP 12652275 A JP12652275 A JP 12652275A JP 12652275 A JP12652275 A JP 12652275A JP S5250160 A JPS5250160 A JP S5250160A
Authority
JP
Japan
Prior art keywords
semiconductor unit
processing method
parts
semiconductor substrate
material featuring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12652275A
Other languages
Japanese (ja)
Inventor
Masahiro Kuwagata
Masao Yamada
Shuji Nakada
Kenichiro Nakamura
Yorisada Kawakami
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electronics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electronics Corp filed Critical Matsushita Electronics Corp
Priority to JP12652275A priority Critical patent/JPS5250160A/en
Publication of JPS5250160A publication Critical patent/JPS5250160A/en
Pending legal-status Critical Current

Links

Landscapes

  • Manufacturing Of Printed Wiring (AREA)
  • Weting (AREA)

Abstract

PURPOSE: Th semiconductor substrate is cleansed with solution containing both the material featuring fat removal capability and the material featuring complex ion formation capability. Thus, an effective cleansing of semiconductor substrate becomes possible.
COPYRIGHT: (C)1977,JPO&Japio
JP12652275A 1975-10-20 1975-10-20 Processing method of semiconductor unit or semiconductor unit parts Pending JPS5250160A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12652275A JPS5250160A (en) 1975-10-20 1975-10-20 Processing method of semiconductor unit or semiconductor unit parts

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12652275A JPS5250160A (en) 1975-10-20 1975-10-20 Processing method of semiconductor unit or semiconductor unit parts

Publications (1)

Publication Number Publication Date
JPS5250160A true JPS5250160A (en) 1977-04-21

Family

ID=14937278

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12652275A Pending JPS5250160A (en) 1975-10-20 1975-10-20 Processing method of semiconductor unit or semiconductor unit parts

Country Status (1)

Country Link
JP (1) JPS5250160A (en)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4831057A (en) * 1971-08-25 1973-04-24
JPS4976468A (en) * 1972-11-13 1974-07-23

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4831057A (en) * 1971-08-25 1973-04-24
JPS4976468A (en) * 1972-11-13 1974-07-23

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