Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Hitachi Ltd
Original Assignee
Hitachi Ltd
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Filing date
Publication date
Application filed by Hitachi LtdfiledCriticalHitachi Ltd
Priority to JP50135111ApriorityCriticalpatent/JPS5260077A/en
Publication of JPS5260077ApublicationCriticalpatent/JPS5260077A/en
PURPOSE: To improve the dielectric strength of a semiconductor device by forming pellet end faces or corners defined by mesa grooves to a round or regular bevel form of a large radius of curvature.
COPYRIGHT: (C)1977,JPO&Japio
JP50135111A1975-11-121975-11-12Semiconductor device and its production
PendingJPS5260077A
(en)