JPS526081A - Semiconductor wafer - Google Patents

Semiconductor wafer

Info

Publication number
JPS526081A
JPS526081A JP8239075A JP8239075A JPS526081A JP S526081 A JPS526081 A JP S526081A JP 8239075 A JP8239075 A JP 8239075A JP 8239075 A JP8239075 A JP 8239075A JP S526081 A JPS526081 A JP S526081A
Authority
JP
Japan
Prior art keywords
semiconductor wafer
epitaxial layer
silicon
silicon epitaxial
wafer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8239075A
Other languages
Japanese (ja)
Inventor
Shinobu Fukunaga
Masahiko Yasuoka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP8239075A priority Critical patent/JPS526081A/en
Publication of JPS526081A publication Critical patent/JPS526081A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: In order to obtain a semiconductor wafer to be used for integratedcircuit with low cost, through forming the silicon epitaxial layer on a silicon epitaxial layer being formed on the surface of a silicon wafer.
COPYRIGHT: (C)1977,JPO&Japio
JP8239075A 1975-07-03 1975-07-03 Semiconductor wafer Pending JPS526081A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8239075A JPS526081A (en) 1975-07-03 1975-07-03 Semiconductor wafer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8239075A JPS526081A (en) 1975-07-03 1975-07-03 Semiconductor wafer

Publications (1)

Publication Number Publication Date
JPS526081A true JPS526081A (en) 1977-01-18

Family

ID=13773239

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8239075A Pending JPS526081A (en) 1975-07-03 1975-07-03 Semiconductor wafer

Country Status (1)

Country Link
JP (1) JPS526081A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62216218A (en) * 1986-03-18 1987-09-22 Fujitsu Ltd Manufacture of semiconductor device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62216218A (en) * 1986-03-18 1987-09-22 Fujitsu Ltd Manufacture of semiconductor device

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