JPS5261484A - Semiconductor pressure transducer - Google Patents

Semiconductor pressure transducer

Info

Publication number
JPS5261484A
JPS5261484A JP13728275A JP13728275A JPS5261484A JP S5261484 A JPS5261484 A JP S5261484A JP 13728275 A JP13728275 A JP 13728275A JP 13728275 A JP13728275 A JP 13728275A JP S5261484 A JPS5261484 A JP S5261484A
Authority
JP
Japan
Prior art keywords
pressure transducer
semiconductor pressure
imprve
bondin
gof
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13728275A
Other languages
Japanese (ja)
Inventor
Shunji Shiromizu
Shozo Sato
Tadahiro Hayashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP13728275A priority Critical patent/JPS5261484A/en
Publication of JPS5261484A publication Critical patent/JPS5261484A/en
Pending legal-status Critical Current

Links

Landscapes

  • Measuring Fluid Pressure (AREA)
  • Pressure Sensors (AREA)

Abstract

PURPOSE: To expand the linear region of output characteristics and imprve temperature dependency by providing a bimetal effect through fixing by bondin gof materials of a coefficient of thermal expansion differing from that of a semiconductor substrate around the substrate.
COPYRIGHT: (C)1977,JPO&Japio
JP13728275A 1975-11-17 1975-11-17 Semiconductor pressure transducer Pending JPS5261484A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13728275A JPS5261484A (en) 1975-11-17 1975-11-17 Semiconductor pressure transducer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13728275A JPS5261484A (en) 1975-11-17 1975-11-17 Semiconductor pressure transducer

Publications (1)

Publication Number Publication Date
JPS5261484A true JPS5261484A (en) 1977-05-20

Family

ID=15195025

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13728275A Pending JPS5261484A (en) 1975-11-17 1975-11-17 Semiconductor pressure transducer

Country Status (1)

Country Link
JP (1) JPS5261484A (en)

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