JPS5263083A - Silicon strain gauge - Google Patents

Silicon strain gauge

Info

Publication number
JPS5263083A
JPS5263083A JP13810475A JP13810475A JPS5263083A JP S5263083 A JPS5263083 A JP S5263083A JP 13810475 A JP13810475 A JP 13810475A JP 13810475 A JP13810475 A JP 13810475A JP S5263083 A JPS5263083 A JP S5263083A
Authority
JP
Japan
Prior art keywords
strain gauge
silicon strain
providing
predetermined
rebalancing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13810475A
Other languages
Japanese (ja)
Inventor
Michitaka Shimazoe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP13810475A priority Critical patent/JPS5263083A/en
Publication of JPS5263083A publication Critical patent/JPS5263083A/en
Pending legal-status Critical Current

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  • Measuring Fluid Pressure (AREA)
  • Pressure Sensors (AREA)

Abstract

PURPOSE: To obtain an Si strain gauge permitting easy temperature compensation by bridging the P type gauges of a predetermined impurity concentration, providing rebalancing variable resistance part, and providing a predetermined relation to temperature coefficients of resistance and gauge factor.
COPYRIGHT: (C)1977,JPO&Japio
JP13810475A 1975-11-19 1975-11-19 Silicon strain gauge Pending JPS5263083A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13810475A JPS5263083A (en) 1975-11-19 1975-11-19 Silicon strain gauge

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13810475A JPS5263083A (en) 1975-11-19 1975-11-19 Silicon strain gauge

Publications (1)

Publication Number Publication Date
JPS5263083A true JPS5263083A (en) 1977-05-25

Family

ID=15214031

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13810475A Pending JPS5263083A (en) 1975-11-19 1975-11-19 Silicon strain gauge

Country Status (1)

Country Link
JP (1) JPS5263083A (en)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5065180A (en) * 1973-10-11 1975-06-02

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5065180A (en) * 1973-10-11 1975-06-02

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