JPS5287076A - Non-linearity correction method of semiconductor diaphragm type pressu re gauge - Google Patents

Non-linearity correction method of semiconductor diaphragm type pressu re gauge

Info

Publication number
JPS5287076A
JPS5287076A JP363676A JP363676A JPS5287076A JP S5287076 A JPS5287076 A JP S5287076A JP 363676 A JP363676 A JP 363676A JP 363676 A JP363676 A JP 363676A JP S5287076 A JPS5287076 A JP S5287076A
Authority
JP
Japan
Prior art keywords
pressu
gauge
correction method
diaphragm type
linearity correction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP363676A
Other languages
Japanese (ja)
Inventor
Satoshi Shimada
Kazuji Yamada
Yasumasa Matsuda
Kazumichi Kimura
Michitaka Shimazoe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP363676A priority Critical patent/JPS5287076A/en
Publication of JPS5287076A publication Critical patent/JPS5287076A/en
Pending legal-status Critical Current

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  • Measuring Fluid Pressure (AREA)

Abstract

PURPOSE: To correct the non-linearity between pressure and strain as well as between strain and resistance and eliminate the adverse influence to temperature characteristics and sensitivity by adjusting the diameter of the recessed circular hole of the strain inducing part on a Si diaphragm being a pressure sensitive part.
COPYRIGHT: (C)1977,JPO&Japio
JP363676A 1976-01-14 1976-01-14 Non-linearity correction method of semiconductor diaphragm type pressu re gauge Pending JPS5287076A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP363676A JPS5287076A (en) 1976-01-14 1976-01-14 Non-linearity correction method of semiconductor diaphragm type pressu re gauge

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP363676A JPS5287076A (en) 1976-01-14 1976-01-14 Non-linearity correction method of semiconductor diaphragm type pressu re gauge

Publications (1)

Publication Number Publication Date
JPS5287076A true JPS5287076A (en) 1977-07-20

Family

ID=11562958

Family Applications (1)

Application Number Title Priority Date Filing Date
JP363676A Pending JPS5287076A (en) 1976-01-14 1976-01-14 Non-linearity correction method of semiconductor diaphragm type pressu re gauge

Country Status (1)

Country Link
JP (1) JPS5287076A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03103741A (en) * 1989-09-19 1991-04-30 Yamatake Honeywell Co Ltd Semiconductor pressure sensor
JPH08334424A (en) * 1995-06-07 1996-12-17 Mitsubishi Electric Corp Semiconductor pressure detector

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03103741A (en) * 1989-09-19 1991-04-30 Yamatake Honeywell Co Ltd Semiconductor pressure sensor
JPH08334424A (en) * 1995-06-07 1996-12-17 Mitsubishi Electric Corp Semiconductor pressure detector

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