JPS526379A - Vessel for powder target - Google Patents

Vessel for powder target

Info

Publication number
JPS526379A
JPS526379A JP50082995A JP8299575A JPS526379A JP S526379 A JPS526379 A JP S526379A JP 50082995 A JP50082995 A JP 50082995A JP 8299575 A JP8299575 A JP 8299575A JP S526379 A JPS526379 A JP S526379A
Authority
JP
Japan
Prior art keywords
vessel
powder target
target
powder
sputtering
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP50082995A
Other languages
Japanese (ja)
Inventor
Takeshi Nagai
Kiyotaka Wasa
Shigeru Hayakawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP50082995A priority Critical patent/JPS526379A/en
Publication of JPS526379A publication Critical patent/JPS526379A/en
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

PURPOSE:A vessel for target of high frequency sputtering which does not contaminate sputtering film.
JP50082995A 1975-07-04 1975-07-04 Vessel for powder target Pending JPS526379A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50082995A JPS526379A (en) 1975-07-04 1975-07-04 Vessel for powder target

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50082995A JPS526379A (en) 1975-07-04 1975-07-04 Vessel for powder target

Publications (1)

Publication Number Publication Date
JPS526379A true JPS526379A (en) 1977-01-18

Family

ID=13789794

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50082995A Pending JPS526379A (en) 1975-07-04 1975-07-04 Vessel for powder target

Country Status (1)

Country Link
JP (1) JPS526379A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5658254U (en) * 1979-10-08 1981-05-19
JPS5751842A (en) * 1980-09-09 1982-03-26 Nissan Motor Weft yarn storing apparatus

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4825401U (en) * 1971-08-02 1973-03-26
JPS4940682U (en) * 1972-07-13 1974-04-10

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4825401U (en) * 1971-08-02 1973-03-26
JPS4940682U (en) * 1972-07-13 1974-04-10

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5658254U (en) * 1979-10-08 1981-05-19
JPS5751842A (en) * 1980-09-09 1982-03-26 Nissan Motor Weft yarn storing apparatus

Similar Documents

Publication Publication Date Title
GB1545849A (en) Moving target indication radar
HU172322B (en) Process for the isolation of zinc from residues containing zinc ferrite
JPS51145038A (en) Microwave oven
JPS526378A (en) Vessel for powder target
CA1009487A (en) Apparatus for forming trays
CA976669A (en) Control mechanism for an electron-optical apparatus
CA982167A (en) Apparatus for unloading cartridges from trays
JPS51119386A (en) Vacuum evapotation vessel
JPS51117986A (en) Sputtering apparatus
CA1018585A (en) Fuser control circuit for copying apparatus
JPS525684A (en) Indicator
JPS5227097A (en) Process of harmless chromium slag
JPS51111365A (en) Time correction mechanism for an electro watch
SU568928A1 (en) Solution for removal of diazophotolayer from substrate
GB1489500A (en) Apparatus for bombarding a target with a beam of charged particles
JPS51147484A (en) A penning discharge sputter film forming apparatus
AU219350B2 (en) Apparatus for forming artificial targets
JPS51122260A (en) Intermediate storage apparatus
JPS5236966A (en) Magnetron
AU2181756A (en) Apparatus for forming artificial targets
CA868539A (en) Device for correcting the path of an electron beam
CA533547A (en) Frequency modulator for radar altimeter
AU2200956A (en) Improvements relating toa mechanical selector mechanism for time controlled apparatus
CA976648A (en) Sputter shield for coaxial gas laser employing cylindrical cathode
JPS51140578A (en) Autohandler