JPS5267260A - Manufacture of iii-v group compounds semiconductor epitaxial laminatio n crystal - Google Patents

Manufacture of iii-v group compounds semiconductor epitaxial laminatio n crystal

Info

Publication number
JPS5267260A
JPS5267260A JP14359975A JP14359975A JPS5267260A JP S5267260 A JPS5267260 A JP S5267260A JP 14359975 A JP14359975 A JP 14359975A JP 14359975 A JP14359975 A JP 14359975A JP S5267260 A JPS5267260 A JP S5267260A
Authority
JP
Japan
Prior art keywords
laminatio
iii
crystal
manufacture
semiconductor epitaxial
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14359975A
Other languages
Japanese (ja)
Other versions
JPS5826657B2 (en
Inventor
Osamu Mizuno
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP14359975A priority Critical patent/JPS5826657B2/en
Publication of JPS5267260A publication Critical patent/JPS5267260A/en
Publication of JPS5826657B2 publication Critical patent/JPS5826657B2/en
Expired legal-status Critical Current

Links

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  • Crystals, And After-Treatments Of Crystals (AREA)

Abstract

PURPOSE: To easily secure sharp and complicated impurity density distribution by installing gas lead tube into quartz-made reaction tube, by creating a window at upper part of the gas lead tube near seed crystal substrate, and by controoling carrier gas amount by gas open/close adjusting valve.
COPYRIGHT: (C)1977,JPO&Japio
JP14359975A 1975-12-01 1975-12-01 3-5 Epitaxy and hand-wringing method Expired JPS5826657B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14359975A JPS5826657B2 (en) 1975-12-01 1975-12-01 3-5 Epitaxy and hand-wringing method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14359975A JPS5826657B2 (en) 1975-12-01 1975-12-01 3-5 Epitaxy and hand-wringing method

Publications (2)

Publication Number Publication Date
JPS5267260A true JPS5267260A (en) 1977-06-03
JPS5826657B2 JPS5826657B2 (en) 1983-06-04

Family

ID=15342459

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14359975A Expired JPS5826657B2 (en) 1975-12-01 1975-12-01 3-5 Epitaxy and hand-wringing method

Country Status (1)

Country Link
JP (1) JPS5826657B2 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61198047A (en) * 1985-02-07 1986-09-02 Kiyataraa Kogyo Kk Structure for insertion type oxigen detector
JPH03111837U (en) * 1990-02-28 1991-11-15
JPH03115337U (en) * 1990-03-13 1991-11-28

Also Published As

Publication number Publication date
JPS5826657B2 (en) 1983-06-04

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