JPS51111057A - Crystal growing device - Google Patents

Crystal growing device

Info

Publication number
JPS51111057A
JPS51111057A JP3555675A JP3555675A JPS51111057A JP S51111057 A JPS51111057 A JP S51111057A JP 3555675 A JP3555675 A JP 3555675A JP 3555675 A JP3555675 A JP 3555675A JP S51111057 A JPS51111057 A JP S51111057A
Authority
JP
Japan
Prior art keywords
crystal growing
growing device
substrate
impurities
intake
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3555675A
Other languages
Japanese (ja)
Inventor
Masahiko Kogirima
Hiroji Saida
Michiyoshi Maki
Koji Honma
Masao Kawamura
Michio Suzuki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP3555675A priority Critical patent/JPS51111057A/en
Publication of JPS51111057A publication Critical patent/JPS51111057A/en
Pending legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Chemical Vapour Deposition (AREA)

Abstract

PURPOSE: To obtain an epitaxial growth layer wherein impurities intake from a substrate occurs to less degree and impurity concentration distribution changes abruptly near the boundary surface from the substrate.
COPYRIGHT: (C)1976,JPO&Japio
JP3555675A 1975-03-26 1975-03-26 Crystal growing device Pending JPS51111057A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3555675A JPS51111057A (en) 1975-03-26 1975-03-26 Crystal growing device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3555675A JPS51111057A (en) 1975-03-26 1975-03-26 Crystal growing device

Publications (1)

Publication Number Publication Date
JPS51111057A true JPS51111057A (en) 1976-10-01

Family

ID=12444992

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3555675A Pending JPS51111057A (en) 1975-03-26 1975-03-26 Crystal growing device

Country Status (1)

Country Link
JP (1) JPS51111057A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5821323A (en) * 1981-07-28 1983-02-08 Toshiba Corp Vapor phase growing unit under vacuum
JPS58176114A (en) * 1982-04-12 1983-10-15 Toshiba Corp Apparatus for manufacturing silicon photosensitive material

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1953247A1 (en) * 1968-10-25 1970-05-14 Hitachi Ltd Method and device for subliming a semiconductor crystal

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1953247A1 (en) * 1968-10-25 1970-05-14 Hitachi Ltd Method and device for subliming a semiconductor crystal

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5821323A (en) * 1981-07-28 1983-02-08 Toshiba Corp Vapor phase growing unit under vacuum
JPS58176114A (en) * 1982-04-12 1983-10-15 Toshiba Corp Apparatus for manufacturing silicon photosensitive material

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