JPS5267977A - Micro pattern fixation method for semiconductor unit - Google Patents

Micro pattern fixation method for semiconductor unit

Info

Publication number
JPS5267977A
JPS5267977A JP50144766A JP14476675A JPS5267977A JP S5267977 A JPS5267977 A JP S5267977A JP 50144766 A JP50144766 A JP 50144766A JP 14476675 A JP14476675 A JP 14476675A JP S5267977 A JPS5267977 A JP S5267977A
Authority
JP
Japan
Prior art keywords
micro pattern
semiconductor unit
fixation method
pattern fixation
organic body
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP50144766A
Other languages
Japanese (ja)
Inventor
Hisashi Fukuda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sanyo Electric Co Ltd
Original Assignee
Sanyo Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sanyo Electric Co Ltd filed Critical Sanyo Electric Co Ltd
Priority to JP50144766A priority Critical patent/JPS5267977A/en
Publication of JPS5267977A publication Critical patent/JPS5267977A/en
Pending legal-status Critical Current

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  • Electron Beam Exposure (AREA)

Abstract

PURPOSE: To secure a simple and accurate fixation of micro pattern through polymerizing solidification of organic body into subscribed area by electronic beam irradiation by exposing the substrate into organic body vapor atmosphere.
COPYRIGHT: (C)1977,JPO&Japio
JP50144766A 1975-12-04 1975-12-04 Micro pattern fixation method for semiconductor unit Pending JPS5267977A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50144766A JPS5267977A (en) 1975-12-04 1975-12-04 Micro pattern fixation method for semiconductor unit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50144766A JPS5267977A (en) 1975-12-04 1975-12-04 Micro pattern fixation method for semiconductor unit

Publications (1)

Publication Number Publication Date
JPS5267977A true JPS5267977A (en) 1977-06-06

Family

ID=15369900

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50144766A Pending JPS5267977A (en) 1975-12-04 1975-12-04 Micro pattern fixation method for semiconductor unit

Country Status (1)

Country Link
JP (1) JPS5267977A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01140729A (en) * 1987-11-27 1989-06-01 Sony Corp Formation of fine pattern
JPH01200676A (en) * 1988-02-05 1989-08-11 Sony Corp Manufacture of semiconductor device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01140729A (en) * 1987-11-27 1989-06-01 Sony Corp Formation of fine pattern
JPH01200676A (en) * 1988-02-05 1989-08-11 Sony Corp Manufacture of semiconductor device

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