JPS5267988A - Throuch-hole formation method - Google Patents

Throuch-hole formation method

Info

Publication number
JPS5267988A
JPS5267988A JP50144879A JP14487975A JPS5267988A JP S5267988 A JPS5267988 A JP S5267988A JP 50144879 A JP50144879 A JP 50144879A JP 14487975 A JP14487975 A JP 14487975A JP S5267988 A JPS5267988 A JP S5267988A
Authority
JP
Japan
Prior art keywords
throuch
formation method
hole formation
hole
pinhole
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP50144879A
Other languages
Japanese (ja)
Inventor
Tatsuyuki Tomioka
Noboru Yoshigami
Kiyoharu Yamashita
Takamichi Hattori
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP50144879A priority Critical patent/JPS5267988A/en
Publication of JPS5267988A publication Critical patent/JPS5267988A/en
Pending legal-status Critical Current

Links

Landscapes

  • Production Of Multi-Layered Print Wiring Board (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Weting (AREA)

Abstract

PURPOSE:To form through-hole with no pinhole to the object to be formed by performing photo etching twice with use of two photo masks containing same pattern.
JP50144879A 1975-12-04 1975-12-04 Throuch-hole formation method Pending JPS5267988A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50144879A JPS5267988A (en) 1975-12-04 1975-12-04 Throuch-hole formation method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50144879A JPS5267988A (en) 1975-12-04 1975-12-04 Throuch-hole formation method

Publications (1)

Publication Number Publication Date
JPS5267988A true JPS5267988A (en) 1977-06-06

Family

ID=15372493

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50144879A Pending JPS5267988A (en) 1975-12-04 1975-12-04 Throuch-hole formation method

Country Status (1)

Country Link
JP (1) JPS5267988A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5825231A (en) * 1981-07-24 1983-02-15 Jeol Ltd Manufacture of mask using electron beam exposure

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5092836A (en) * 1973-12-20 1975-07-24

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5092836A (en) * 1973-12-20 1975-07-24

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5825231A (en) * 1981-07-24 1983-02-15 Jeol Ltd Manufacture of mask using electron beam exposure

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