JPS5268360A - Formation of thin film - Google Patents
Formation of thin filmInfo
- Publication number
- JPS5268360A JPS5268360A JP14441475A JP14441475A JPS5268360A JP S5268360 A JPS5268360 A JP S5268360A JP 14441475 A JP14441475 A JP 14441475A JP 14441475 A JP14441475 A JP 14441475A JP S5268360 A JPS5268360 A JP S5268360A
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- formation
- film
- supermatant
- exhaustion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010409 thin film Substances 0.000 title abstract 2
- 230000015572 biosynthetic process Effects 0.000 title 1
- 239000010408 film Substances 0.000 abstract 2
- 238000001035 drying Methods 0.000 abstract 1
- 238000004299 exfoliation Methods 0.000 abstract 1
- 239000007788 liquid Substances 0.000 abstract 1
- 238000000034 method Methods 0.000 abstract 1
- 238000001556 precipitation Methods 0.000 abstract 1
- 238000009423 ventilation Methods 0.000 abstract 1
Landscapes
- Formation Of Various Coating Films On Cathode Ray Tubes And Lamps (AREA)
Abstract
PURPOSE: In case thin film is formed through precipitation method, exhaustion of supermatant liquid is performed by inclining the container. Soon after this, drying is carried out using ventilation tube. In this way, bubble occurrence, film exfoliation, and film thickness unevenness can be effectively eliminated.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14441475A JPS5268360A (en) | 1975-12-05 | 1975-12-05 | Formation of thin film |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14441475A JPS5268360A (en) | 1975-12-05 | 1975-12-05 | Formation of thin film |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5268360A true JPS5268360A (en) | 1977-06-07 |
Family
ID=15361607
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14441475A Pending JPS5268360A (en) | 1975-12-05 | 1975-12-05 | Formation of thin film |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5268360A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5015621A (en) * | 1988-06-02 | 1991-05-14 | Semiconductor Energy Laboratory Co., Ltd. | Sedimentation method for forming Bi-containing superconducting films |
-
1975
- 1975-12-05 JP JP14441475A patent/JPS5268360A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5015621A (en) * | 1988-06-02 | 1991-05-14 | Semiconductor Energy Laboratory Co., Ltd. | Sedimentation method for forming Bi-containing superconducting films |
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