JPS51136288A - Photo etching using non-crystalline carchogenide glass thin film - Google Patents

Photo etching using non-crystalline carchogenide glass thin film

Info

Publication number
JPS51136288A
JPS51136288A JP5956375A JP5956375A JPS51136288A JP S51136288 A JPS51136288 A JP S51136288A JP 5956375 A JP5956375 A JP 5956375A JP 5956375 A JP5956375 A JP 5956375A JP S51136288 A JPS51136288 A JP S51136288A
Authority
JP
Japan
Prior art keywords
thin film
carchogenide
crystalline
photo etching
glass thin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5956375A
Other languages
Japanese (ja)
Other versions
JPS594848B2 (en
Inventor
Haruo Nagai
Yoshio Toyoshima
Kunishige Oe
Osamu Ochi
Etsuo Noguchi
Sakae Maebotoke
Yasushi Utsuki
Yoshihiko Mizushima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NTT Inc
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP50059563A priority Critical patent/JPS594848B2/en
Publication of JPS51136288A publication Critical patent/JPS51136288A/en
Publication of JPS594848B2 publication Critical patent/JPS594848B2/en
Expired legal-status Critical Current

Links

Landscapes

  • Glass Compositions (AREA)
  • Weting (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Non-Silver Salt Photosensitive Materials And Non-Silver Salt Photography (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Surface Treatment Of Glass (AREA)

Abstract

PURPOSE: Simplified thin film formation and elimination and improved chemical resistivity by the use of non-crystaline carchogenide thin film in stad of orgnic compound.
COPYRIGHT: (C)1976,JPO&Japio
JP50059563A 1975-05-21 1975-05-21 Photoetching method using amorphous chalcogenide glass thin film Expired JPS594848B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50059563A JPS594848B2 (en) 1975-05-21 1975-05-21 Photoetching method using amorphous chalcogenide glass thin film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50059563A JPS594848B2 (en) 1975-05-21 1975-05-21 Photoetching method using amorphous chalcogenide glass thin film

Publications (2)

Publication Number Publication Date
JPS51136288A true JPS51136288A (en) 1976-11-25
JPS594848B2 JPS594848B2 (en) 1984-02-01

Family

ID=13116822

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50059563A Expired JPS594848B2 (en) 1975-05-21 1975-05-21 Photoetching method using amorphous chalcogenide glass thin film

Country Status (1)

Country Link
JP (1) JPS594848B2 (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61155843U (en) * 1985-03-16 1986-09-27
WO2007023708A1 (en) * 2005-08-25 2007-03-01 Asahi Glass Company, Limited Base with film and glass for film formation
WO2017110500A1 (en) * 2015-12-25 2017-06-29 日本電気硝子株式会社 Infrared transmitting glass
JP2017124952A (en) * 2016-01-14 2017-07-20 日本電気硝子株式会社 Infrared transmission glass
JP2021054716A (en) * 2020-12-14 2021-04-08 日本電気硝子株式会社 Infrared transmitting glass

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4845302A (en) * 1971-10-11 1973-06-28
JPS4910018A (en) * 1972-05-23 1974-01-29
JPS4924367A (en) * 1972-06-28 1974-03-04
JPS50827A (en) * 1973-04-28 1975-01-07

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4845302A (en) * 1971-10-11 1973-06-28
JPS4910018A (en) * 1972-05-23 1974-01-29
JPS4924367A (en) * 1972-06-28 1974-03-04
JPS50827A (en) * 1973-04-28 1975-01-07

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61155843U (en) * 1985-03-16 1986-09-27
WO2007023708A1 (en) * 2005-08-25 2007-03-01 Asahi Glass Company, Limited Base with film and glass for film formation
JPWO2007023708A1 (en) * 2005-08-25 2009-02-26 旭硝子株式会社 Substrate with film and glass for film formation
US7923115B2 (en) 2005-08-25 2011-04-12 Asahi Glass Company, Limited Substrate with film and glass for formation film
WO2017110500A1 (en) * 2015-12-25 2017-06-29 日本電気硝子株式会社 Infrared transmitting glass
JP2017124952A (en) * 2016-01-14 2017-07-20 日本電気硝子株式会社 Infrared transmission glass
JP2021054716A (en) * 2020-12-14 2021-04-08 日本電気硝子株式会社 Infrared transmitting glass

Also Published As

Publication number Publication date
JPS594848B2 (en) 1984-02-01

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