JPS5269874A - Coating method - Google Patents

Coating method

Info

Publication number
JPS5269874A
JPS5269874A JP50147094A JP14709475A JPS5269874A JP S5269874 A JPS5269874 A JP S5269874A JP 50147094 A JP50147094 A JP 50147094A JP 14709475 A JP14709475 A JP 14709475A JP S5269874 A JPS5269874 A JP S5269874A
Authority
JP
Japan
Prior art keywords
coating
coating method
unform
coated
rectangular
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP50147094A
Other languages
Japanese (ja)
Inventor
Yoshihiko Doi
Mitsunori Kobayashi
Yasushi Miyawaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Electric Industries Ltd
Original Assignee
Sumitomo Electric Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Electric Industries Ltd filed Critical Sumitomo Electric Industries Ltd
Priority to JP50147094A priority Critical patent/JPS5269874A/en
Publication of JPS5269874A publication Critical patent/JPS5269874A/en
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/50—Substrate holders
    • C23C14/505—Substrate holders for rotation of the substrates

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

PURPOSE:To make the unform surface coating with one coating operation, even in case of coating difficult, by rotatory supporting the parts to be coated, with a specific angle to the rotating rod, placed to rectangular to the ion etc. advance direction of the coating material.
JP50147094A 1975-12-09 1975-12-09 Coating method Pending JPS5269874A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50147094A JPS5269874A (en) 1975-12-09 1975-12-09 Coating method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50147094A JPS5269874A (en) 1975-12-09 1975-12-09 Coating method

Publications (1)

Publication Number Publication Date
JPS5269874A true JPS5269874A (en) 1977-06-10

Family

ID=15422331

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50147094A Pending JPS5269874A (en) 1975-12-09 1975-12-09 Coating method

Country Status (1)

Country Link
JP (1) JPS5269874A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4839145A (en) * 1986-08-27 1989-06-13 Massachusetts Institute Of Technology Chemical vapor deposition reactor

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4839145A (en) * 1986-08-27 1989-06-13 Massachusetts Institute Of Technology Chemical vapor deposition reactor

Similar Documents

Publication Publication Date Title
CA1014431A (en) Method for coating fabrics
CA924056A (en) Method for treating textile material with a liquid as well as an apparatus for working the method
CH611687A5 (en) High-vacuum valve, in particular for ultrahigh-vacuum purposes
HU172102B (en) Method for coating steel with tin
JPS51128686A (en) Surface coating method with diamond-like carbon
AU510574B2 (en) Container adapted tobe displaced by rotary force
BE844651A (en) PARTS COATING PROCESS
JPS5254108A (en) Surface pulse motor
JPS51141266A (en) Process for improving soil with fossil shelllfish shelllfish fossil
JPS5238484A (en) Method of ionplating
JPS51130205A (en) A process for producing a magnetic recording material
JPS51131481A (en) A vacuum vaporizing apparatus
JPS51147851A (en) Material handling device installed on truck, etc., in freely rotary wa y
JPS51128789A (en) Cylindrical barrel tank for fluidity- processing and its manufacturing method
CA1025605A (en) Process for spray coating with insulation material
CA1030824A (en) Method for coating a substrate with insulating particles
JPS51151636A (en) Process for coating with siliciferous material
JPS5222038A (en) Trowel apparatus for coating
CA994488A (en) Process for preparing a hardenable coating composition
JPS5243738A (en) Process for pretreating metal surface in metal coating
JPS5231962A (en) Products made by drawing corrosion resisting magnetic material
JPS51142826A (en) Plateelike stone material with large adhesion
JPS51147095A (en) Method for forming patterns on stone materials
JPS51140889A (en) A vapor phase growth apparatus
JPS5228086A (en) Servo device

Legal Events

Date Code Title Description
R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

FPAY Renewal fee payment (prs date is renewal date of database)

Year of fee payment: 7

Free format text: PAYMENT UNTIL: 20081019

FPAY Renewal fee payment (prs date is renewal date of database)

Free format text: PAYMENT UNTIL: 20091019

Year of fee payment: 8

FPAY Renewal fee payment (prs date is renewal date of database)

Year of fee payment: 9

Free format text: PAYMENT UNTIL: 20101019

FPAY Renewal fee payment (prs date is renewal date of database)

Year of fee payment: 10

Free format text: PAYMENT UNTIL: 20111019

FPAY Renewal fee payment (prs date is renewal date of database)

Year of fee payment: 11

Free format text: PAYMENT UNTIL: 20121019

FPAY Renewal fee payment (prs date is renewal date of database)

Year of fee payment: 11

Free format text: PAYMENT UNTIL: 20121019

FPAY Renewal fee payment (prs date is renewal date of database)

Year of fee payment: 12

Free format text: PAYMENT UNTIL: 20131019

EXPY Cancellation because of completion of term