JPS5273678A - Semiconductor device and its production - Google Patents

Semiconductor device and its production

Info

Publication number
JPS5273678A
JPS5273678A JP14952275A JP14952275A JPS5273678A JP S5273678 A JPS5273678 A JP S5273678A JP 14952275 A JP14952275 A JP 14952275A JP 14952275 A JP14952275 A JP 14952275A JP S5273678 A JPS5273678 A JP S5273678A
Authority
JP
Japan
Prior art keywords
production
semiconductor device
film
highly reliable
protecting film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14952275A
Other languages
Japanese (ja)
Inventor
Ryosaku Kanzawa
Susumu Murakami
Hideyuki Yagi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP14952275A priority Critical patent/JPS5273678A/en
Publication of JPS5273678A publication Critical patent/JPS5273678A/en
Pending legal-status Critical Current

Links

Landscapes

  • Formation Of Insulating Films (AREA)

Abstract

PURPOSE: To obtain a highly reliable protecting film by using a Ta film.
COPYRIGHT: (C)1977,JPO&Japio
JP14952275A 1975-12-17 1975-12-17 Semiconductor device and its production Pending JPS5273678A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14952275A JPS5273678A (en) 1975-12-17 1975-12-17 Semiconductor device and its production

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14952275A JPS5273678A (en) 1975-12-17 1975-12-17 Semiconductor device and its production

Publications (1)

Publication Number Publication Date
JPS5273678A true JPS5273678A (en) 1977-06-20

Family

ID=15476966

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14952275A Pending JPS5273678A (en) 1975-12-17 1975-12-17 Semiconductor device and its production

Country Status (1)

Country Link
JP (1) JPS5273678A (en)

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