JPS5274538A - Vaporisation process - Google Patents

Vaporisation process

Info

Publication number
JPS5274538A
JPS5274538A JP14961375A JP14961375A JPS5274538A JP S5274538 A JPS5274538 A JP S5274538A JP 14961375 A JP14961375 A JP 14961375A JP 14961375 A JP14961375 A JP 14961375A JP S5274538 A JPS5274538 A JP S5274538A
Authority
JP
Japan
Prior art keywords
vaporisation process
vaporisation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14961375A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5429408B2 (cs
Inventor
Yutaka Takeda
Yasuharu Shima
Yoshimitsu Sasaki
Hisao Nakajima
Kazuhiro Kurata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP14961375A priority Critical patent/JPS5274538A/ja
Publication of JPS5274538A publication Critical patent/JPS5274538A/ja
Publication of JPS5429408B2 publication Critical patent/JPS5429408B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Cleaning And De-Greasing Of Metallic Materials By Chemical Methods (AREA)
  • Electrodes Of Semiconductors (AREA)
  • Weting (AREA)
JP14961375A 1975-12-17 1975-12-17 Vaporisation process Granted JPS5274538A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14961375A JPS5274538A (en) 1975-12-17 1975-12-17 Vaporisation process

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14961375A JPS5274538A (en) 1975-12-17 1975-12-17 Vaporisation process

Publications (2)

Publication Number Publication Date
JPS5274538A true JPS5274538A (en) 1977-06-22
JPS5429408B2 JPS5429408B2 (cs) 1979-09-22

Family

ID=15479025

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14961375A Granted JPS5274538A (en) 1975-12-17 1975-12-17 Vaporisation process

Country Status (1)

Country Link
JP (1) JPS5274538A (cs)

Also Published As

Publication number Publication date
JPS5429408B2 (cs) 1979-09-22

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