JPS5429408B2 - - Google Patents
Info
- Publication number
- JPS5429408B2 JPS5429408B2 JP14961375A JP14961375A JPS5429408B2 JP S5429408 B2 JPS5429408 B2 JP S5429408B2 JP 14961375 A JP14961375 A JP 14961375A JP 14961375 A JP14961375 A JP 14961375A JP S5429408 B2 JPS5429408 B2 JP S5429408B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Physical Vapour Deposition (AREA)
- Cleaning And De-Greasing Of Metallic Materials By Chemical Methods (AREA)
- Electrodes Of Semiconductors (AREA)
- Weting (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14961375A JPS5274538A (en) | 1975-12-17 | 1975-12-17 | Vaporisation process |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14961375A JPS5274538A (en) | 1975-12-17 | 1975-12-17 | Vaporisation process |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5274538A JPS5274538A (en) | 1977-06-22 |
| JPS5429408B2 true JPS5429408B2 (cs) | 1979-09-22 |
Family
ID=15479025
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14961375A Granted JPS5274538A (en) | 1975-12-17 | 1975-12-17 | Vaporisation process |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5274538A (cs) |
-
1975
- 1975-12-17 JP JP14961375A patent/JPS5274538A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5274538A (en) | 1977-06-22 |