JPS528560B2 - - Google Patents
Info
- Publication number
- JPS528560B2 JPS528560B2 JP2470572A JP2470572A JPS528560B2 JP S528560 B2 JPS528560 B2 JP S528560B2 JP 2470572 A JP2470572 A JP 2470572A JP 2470572 A JP2470572 A JP 2470572A JP S528560 B2 JPS528560 B2 JP S528560B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Workshop Equipment, Work Benches, Supports, Or Storage Means (AREA)
- Devices For Use In Laboratory Experiments (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2470572A JPS528560B2 (ja) | 1972-03-13 | 1972-03-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2470572A JPS528560B2 (ja) | 1972-03-13 | 1972-03-13 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4892997A JPS4892997A (ja) | 1973-12-01 |
| JPS528560B2 true JPS528560B2 (ja) | 1977-03-10 |
Family
ID=12145582
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2470572A Expired JPS528560B2 (ja) | 1972-03-13 | 1972-03-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS528560B2 (ja) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6016376A (ja) * | 1983-07-07 | 1985-01-28 | 関西日本電気株式会社 | 半導体製造用作業装置 |
-
1972
- 1972-03-13 JP JP2470572A patent/JPS528560B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS4892997A (ja) | 1973-12-01 |