JPS5291646A - Array probe card for testing ic wafer - Google Patents

Array probe card for testing ic wafer

Info

Publication number
JPS5291646A
JPS5291646A JP797976A JP797976A JPS5291646A JP S5291646 A JPS5291646 A JP S5291646A JP 797976 A JP797976 A JP 797976A JP 797976 A JP797976 A JP 797976A JP S5291646 A JPS5291646 A JP S5291646A
Authority
JP
Japan
Prior art keywords
wafer
testing
probe card
array probe
zig
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP797976A
Other languages
Japanese (ja)
Inventor
Akira Aida
Shinichi Hanayama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP797976A priority Critical patent/JPS5291646A/en
Publication of JPS5291646A publication Critical patent/JPS5291646A/en
Pending legal-status Critical Current

Links

Landscapes

  • Measuring Leads Or Probes (AREA)

Abstract

PURPOSE: To perform test to IC having more device pins than conventional ones by sterically holding probe needles to a pellet wherein bonding pads are arranged in a zig-zag manner.
COPYRIGHT: (C)1977,JPO&Japio
JP797976A 1976-01-29 1976-01-29 Array probe card for testing ic wafer Pending JPS5291646A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP797976A JPS5291646A (en) 1976-01-29 1976-01-29 Array probe card for testing ic wafer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP797976A JPS5291646A (en) 1976-01-29 1976-01-29 Array probe card for testing ic wafer

Publications (1)

Publication Number Publication Date
JPS5291646A true JPS5291646A (en) 1977-08-02

Family

ID=11680554

Family Applications (1)

Application Number Title Priority Date Filing Date
JP797976A Pending JPS5291646A (en) 1976-01-29 1976-01-29 Array probe card for testing ic wafer

Country Status (1)

Country Link
JP (1) JPS5291646A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5847777U (en) * 1981-09-29 1983-03-31 三菱電機株式会社 Test head for testing printed wiring boards
KR20030075541A (en) * 2002-03-19 2003-09-26 주식회사 파이컴 Probe of inspection apparatus for testing flat pannel display

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5847777U (en) * 1981-09-29 1983-03-31 三菱電機株式会社 Test head for testing printed wiring boards
KR20030075541A (en) * 2002-03-19 2003-09-26 주식회사 파이컴 Probe of inspection apparatus for testing flat pannel display

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