JPS5599734A - Pattern-sheet for characteristic test of semiconductor element - Google Patents

Pattern-sheet for characteristic test of semiconductor element

Info

Publication number
JPS5599734A
JPS5599734A JP713679A JP713679A JPS5599734A JP S5599734 A JPS5599734 A JP S5599734A JP 713679 A JP713679 A JP 713679A JP 713679 A JP713679 A JP 713679A JP S5599734 A JPS5599734 A JP S5599734A
Authority
JP
Japan
Prior art keywords
sheet
characteristic test
wafer
pattern
semiconductor element
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP713679A
Other languages
Japanese (ja)
Inventor
Shinaya Okamura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP713679A priority Critical patent/JPS5599734A/en
Publication of JPS5599734A publication Critical patent/JPS5599734A/en
Pending legal-status Critical Current

Links

Landscapes

  • Testing Or Measuring Of Semiconductors Or The Like (AREA)

Abstract

PURPOSE: To perform, with one positioning, plurality of characteristic tests continuously or in one time, by using pattern sheet provided with electrode terminals, corresponding to plural elements.
CONSTITUTION: At the time of element characteristic test of wafer 4, pattern sheet for characteristic test is put on wafer 4 which is fixed with wafer supporting stand 3. By positioning target patterns A, B which are provided in two places of both wafer 4 and sheet 6 in commonly used positions, then all electrode terminal positionings are completed.
COPYRIGHT: (C)1980,JPO&Japio
JP713679A 1979-01-26 1979-01-26 Pattern-sheet for characteristic test of semiconductor element Pending JPS5599734A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP713679A JPS5599734A (en) 1979-01-26 1979-01-26 Pattern-sheet for characteristic test of semiconductor element

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP713679A JPS5599734A (en) 1979-01-26 1979-01-26 Pattern-sheet for characteristic test of semiconductor element

Publications (1)

Publication Number Publication Date
JPS5599734A true JPS5599734A (en) 1980-07-30

Family

ID=11657651

Family Applications (1)

Application Number Title Priority Date Filing Date
JP713679A Pending JPS5599734A (en) 1979-01-26 1979-01-26 Pattern-sheet for characteristic test of semiconductor element

Country Status (1)

Country Link
JP (1) JPS5599734A (en)

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5883153U (en) * 1981-11-30 1983-06-06 日本電気ホームエレクトロニクス株式会社 Wafer inspection equipment
JPS5992584A (en) * 1982-11-18 1984-05-28 Agency Of Ind Science & Technol Probe for testing superconductive thin film functional integrated circuit element
JPS63122233A (en) * 1986-11-12 1988-05-26 Nec Corp Measuring device for semiconductor integrated circuit
JPS6435597A (en) * 1987-07-31 1989-02-06 Sharp Kk Inspector for liquid crystal display device
JPH03171749A (en) * 1989-11-30 1991-07-25 Toshiba Corp Probe card and semiconductor testing device
JPH0496344A (en) * 1990-08-13 1992-03-27 Toshiba Corp Film carrier structure
JPH04266043A (en) * 1990-10-31 1992-09-22 Hughes Aircraft Co Apparatus and method for test of integrated circuit
US5431860A (en) * 1991-02-01 1995-07-11 Richter Gedeon Vegyeszeti Gyar Rt. Complex mixing device for dispersion of gases in liquid

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS547877A (en) * 1977-06-20 1979-01-20 Nec Corp Test method for electronic device

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS547877A (en) * 1977-06-20 1979-01-20 Nec Corp Test method for electronic device

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5883153U (en) * 1981-11-30 1983-06-06 日本電気ホームエレクトロニクス株式会社 Wafer inspection equipment
JPS5992584A (en) * 1982-11-18 1984-05-28 Agency Of Ind Science & Technol Probe for testing superconductive thin film functional integrated circuit element
JPS63122233A (en) * 1986-11-12 1988-05-26 Nec Corp Measuring device for semiconductor integrated circuit
JPS6435597A (en) * 1987-07-31 1989-02-06 Sharp Kk Inspector for liquid crystal display device
JPH03171749A (en) * 1989-11-30 1991-07-25 Toshiba Corp Probe card and semiconductor testing device
JPH0496344A (en) * 1990-08-13 1992-03-27 Toshiba Corp Film carrier structure
JPH04266043A (en) * 1990-10-31 1992-09-22 Hughes Aircraft Co Apparatus and method for test of integrated circuit
US5431860A (en) * 1991-02-01 1995-07-11 Richter Gedeon Vegyeszeti Gyar Rt. Complex mixing device for dispersion of gases in liquid

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