JPS5291652A - Fine and coarse feeder - Google Patents

Fine and coarse feeder

Info

Publication number
JPS5291652A
JPS5291652A JP818676A JP818676A JPS5291652A JP S5291652 A JPS5291652 A JP S5291652A JP 818676 A JP818676 A JP 818676A JP 818676 A JP818676 A JP 818676A JP S5291652 A JPS5291652 A JP S5291652A
Authority
JP
Japan
Prior art keywords
fine
coarse feeder
movable bed
coarse
feeder
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP818676A
Other languages
Japanese (ja)
Other versions
JPS5540176B2 (en
Inventor
Haruhiko Tsuchiya
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NTT Inc
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP818676A priority Critical patent/JPS5291652A/en
Publication of JPS5291652A publication Critical patent/JPS5291652A/en
Publication of JPS5540176B2 publication Critical patent/JPS5540176B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Control Of Position Or Direction (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Mechanical Control Devices (AREA)

Abstract

PURPOSE: To make a fine and coarse movement for a movable bed by exerting forces on two points at different distances from the pivotal center of a lever pivoted on the surface of the movable bed guided by guide members.
COPYRIGHT: (C)1977,JPO&Japio
JP818676A 1976-01-28 1976-01-28 Fine and coarse feeder Granted JPS5291652A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP818676A JPS5291652A (en) 1976-01-28 1976-01-28 Fine and coarse feeder

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP818676A JPS5291652A (en) 1976-01-28 1976-01-28 Fine and coarse feeder

Publications (2)

Publication Number Publication Date
JPS5291652A true JPS5291652A (en) 1977-08-02
JPS5540176B2 JPS5540176B2 (en) 1980-10-16

Family

ID=11686262

Family Applications (1)

Application Number Title Priority Date Filing Date
JP818676A Granted JPS5291652A (en) 1976-01-28 1976-01-28 Fine and coarse feeder

Country Status (1)

Country Link
JP (1) JPS5291652A (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4684767B2 (en) * 2005-06-29 2011-05-18 Ｈｏｙａ株式会社 Precision reciprocating linear drive mechanism

Also Published As

Publication number Publication date
JPS5540176B2 (en) 1980-10-16

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