JPS51139267A - Photo-mask - Google Patents

Photo-mask

Info

Publication number
JPS51139267A
JPS51139267A JP6288075A JP6288075A JPS51139267A JP S51139267 A JPS51139267 A JP S51139267A JP 6288075 A JP6288075 A JP 6288075A JP 6288075 A JP6288075 A JP 6288075A JP S51139267 A JPS51139267 A JP S51139267A
Authority
JP
Japan
Prior art keywords
photo
mask
obtaining
resist pattern
mask used
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6288075A
Other languages
Japanese (ja)
Inventor
Koji Yamada
Hideki Nishida
Norikazu Tsumita
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP6288075A priority Critical patent/JPS51139267A/en
Publication of JPS51139267A publication Critical patent/JPS51139267A/en
Pending legal-status Critical Current

Links

Landscapes

  • Preparing Plates And Mask In Photomechanical Process (AREA)

Abstract

PURPOSE: To obtain a photo-mask used for obtaining a desired resist pattern.
COPYRIGHT: (C)1976,JPO&Japio
JP6288075A 1975-05-28 1975-05-28 Photo-mask Pending JPS51139267A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6288075A JPS51139267A (en) 1975-05-28 1975-05-28 Photo-mask

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6288075A JPS51139267A (en) 1975-05-28 1975-05-28 Photo-mask

Publications (1)

Publication Number Publication Date
JPS51139267A true JPS51139267A (en) 1976-12-01

Family

ID=13213010

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6288075A Pending JPS51139267A (en) 1975-05-28 1975-05-28 Photo-mask

Country Status (1)

Country Link
JP (1) JPS51139267A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5664342A (en) * 1979-10-29 1981-06-01 Ulvac Corp Photomask original plate having protective film on reverse side
JPS58138028A (en) * 1982-02-12 1983-08-16 Hitachi Ltd Correcting method for photo mask defect
JPS6087327A (en) * 1983-10-19 1985-05-17 Akai Electric Co Ltd Preparation of chromium mask
JPS60102343U (en) * 1983-12-20 1985-07-12 株式会社　昭電 Floor plate support device

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5664342A (en) * 1979-10-29 1981-06-01 Ulvac Corp Photomask original plate having protective film on reverse side
JPS58138028A (en) * 1982-02-12 1983-08-16 Hitachi Ltd Correcting method for photo mask defect
JPS6087327A (en) * 1983-10-19 1985-05-17 Akai Electric Co Ltd Preparation of chromium mask
JPS60102343U (en) * 1983-12-20 1985-07-12 株式会社　昭電 Floor plate support device

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