JPS5295164A - Dividing and cleansing for semi-conductor pellet - Google Patents

Dividing and cleansing for semi-conductor pellet

Info

Publication number
JPS5295164A
JPS5295164A JP1145276A JP1145276A JPS5295164A JP S5295164 A JPS5295164 A JP S5295164A JP 1145276 A JP1145276 A JP 1145276A JP 1145276 A JP1145276 A JP 1145276A JP S5295164 A JPS5295164 A JP S5295164A
Authority
JP
Japan
Prior art keywords
dividing
cleansing
semi
conductor pellet
pellet
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1145276A
Other languages
Japanese (ja)
Inventor
Yukio Takahashi
Shinaya Okamura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP1145276A priority Critical patent/JPS5295164A/en
Publication of JPS5295164A publication Critical patent/JPS5295164A/en
Pending legal-status Critical Current

Links

Landscapes

  • Dicing (AREA)
  • Cleaning Or Drying Semiconductors (AREA)

Abstract

PURPOSE: To facilitate secure and automated cleansing by dividing wafers adhered on a sustaining base through the intermediary of a wax layer into pellets, heating them to exfoliate, and sustaining them in orderly fashion.
COPYRIGHT: (C)1977,JPO&Japio
JP1145276A 1976-02-06 1976-02-06 Dividing and cleansing for semi-conductor pellet Pending JPS5295164A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1145276A JPS5295164A (en) 1976-02-06 1976-02-06 Dividing and cleansing for semi-conductor pellet

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1145276A JPS5295164A (en) 1976-02-06 1976-02-06 Dividing and cleansing for semi-conductor pellet

Publications (1)

Publication Number Publication Date
JPS5295164A true JPS5295164A (en) 1977-08-10

Family

ID=11778480

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1145276A Pending JPS5295164A (en) 1976-02-06 1976-02-06 Dividing and cleansing for semi-conductor pellet

Country Status (1)

Country Link
JP (1) JPS5295164A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH029186A (en) * 1988-06-28 1990-01-12 Tanaka Kikinzoku Kogyo Kk Manufacture of square type block
US5494549A (en) * 1992-01-08 1996-02-27 Rohm Co., Ltd. Dicing method

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH029186A (en) * 1988-06-28 1990-01-12 Tanaka Kikinzoku Kogyo Kk Manufacture of square type block
US5494549A (en) * 1992-01-08 1996-02-27 Rohm Co., Ltd. Dicing method

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