JPS5295977A - Mask fitting device of semiconductor substrate - Google Patents

Mask fitting device of semiconductor substrate

Info

Publication number
JPS5295977A
JPS5295977A JP1267276A JP1267276A JPS5295977A JP S5295977 A JPS5295977 A JP S5295977A JP 1267276 A JP1267276 A JP 1267276A JP 1267276 A JP1267276 A JP 1267276A JP S5295977 A JPS5295977 A JP S5295977A
Authority
JP
Japan
Prior art keywords
semiconductor substrate
fitting device
mask fitting
hole
mask
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1267276A
Other languages
Japanese (ja)
Inventor
Takami Sakota
Hidenori Seki
Kuniya Shimazaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP1267276A priority Critical patent/JPS5295977A/en
Publication of JPS5295977A publication Critical patent/JPS5295977A/en
Pending legal-status Critical Current

Links

Landscapes

  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)

Abstract

PURPOSE: To prevent contamination in fitting mask by providing a substrate adsorbing hole and a detaching hole and connecting the adsorbing hole to a filter and pressure reduction source through a duct having a by-pass is always conducting.
COPYRIGHT: (C)1977,JPO&Japio
JP1267276A 1976-02-07 1976-02-07 Mask fitting device of semiconductor substrate Pending JPS5295977A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1267276A JPS5295977A (en) 1976-02-07 1976-02-07 Mask fitting device of semiconductor substrate

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1267276A JPS5295977A (en) 1976-02-07 1976-02-07 Mask fitting device of semiconductor substrate

Publications (1)

Publication Number Publication Date
JPS5295977A true JPS5295977A (en) 1977-08-12

Family

ID=11811853

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1267276A Pending JPS5295977A (en) 1976-02-07 1976-02-07 Mask fitting device of semiconductor substrate

Country Status (1)

Country Link
JP (1) JPS5295977A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5946030A (en) * 1982-09-08 1984-03-15 Canon Inc Sticking and fixing method for mask or wafer
JPS59155132A (en) * 1984-01-18 1984-09-04 Hitachi Ltd Wafer separating method in exposure

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5946030A (en) * 1982-09-08 1984-03-15 Canon Inc Sticking and fixing method for mask or wafer
JPS59155132A (en) * 1984-01-18 1984-09-04 Hitachi Ltd Wafer separating method in exposure

Similar Documents

Publication Publication Date Title
JPS5295977A (en) Mask fitting device of semiconductor substrate
JPS52151560A (en) Production of semiconductor device
JPS5213018A (en) Secondary air sucking device
JPS5295980A (en) Mask fitting device of semiconductor substrate
JPS5295979A (en) Mask fitting device of semiconductor substrate
JPS5321574A (en) Contact and separation method of photo mask
JPS5295978A (en) Mask fitting device of semiconductor substrate
JPS52109369A (en) Manufacture of semiconductor device
JPS5330875A (en) Production of semiconductor device
JPS52125977A (en) Gear apparatus
JPS53127832A (en) Antiphkogistics for oral administration containing thiaprostaglandins
JPS5384466A (en) Manufacture of semiconductor device
JPS5324231A (en) Display device
JPS53142168A (en) Reproductive use of semiconductor substrate
JPS543473A (en) Manufacture of semiconductor device
JPS5210676A (en) Semiconductor device
JPS5429978A (en) Carrier device for semiconductor wafer and mask
JPS5261483A (en) Semiconductor pressure transducer
JPS5338991A (en) Semiconductor device
JPS5318963A (en) Scrub-cleaning device for masks
JPS52119067A (en) Semiconductor device
JPS5345975A (en) Mask for exposure
JPS52134395A (en) Led display device
JPS52119170A (en) Automatic exchanging of masks
JPS5350947A (en) Logical device